Lens bonded X-ray scintillator system and manufacturing method therefor
A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum efficiency of up to 95%. The design of this detector also allows it to function as an energy filter to remove high-energy x-rays. This detector is useful in a wide range of applications including x-ray imaging, spectroscopy, and diffraction. The scintillator optical system has scintillator material with a lens system for collecting the light that is generated in the scintillator material. A substrate is used for spacing the scintillator material from the lens system.
1. A method for fabricating a scintillator system, comprising:
bonding scintillator material to a substrate;
polishing the scintillator material to a desired thickness; and
mounting the substrate on an immersion-type microscope objective.
2. A method as claimed in claim 1 , wherein the step of polishing the scintillator material comprises polishing the scintillator material to a thickness of less than 50 micrometers.
3. A method as claimed in claim 1 , wherein the step of polishing the scintillator material comprises polishing the scintillator material to a thickness of less than 15 micrometers.
4. A method as claimed in claim 1 , wherein the scintillator material is thallium doped CsI.
5. A method as claimed in claim 1 , further comprising beveling a sidewall of the scintillator material prior to the step of polishing the scintillator material.
6. A method as claimed in claim 1 , further comprising coating the scintillator material with a reflector.
7. A method as claimed in claim 1 , further comprising mounting the substrate on a microscope objective.
8. A method as claimed in claim 1 , further comprising mounting the substrate on a front of a magnifying lens.
9. A method as claimed in claim 1 , further comprising bonding the substrate to a microscope objective.
10. A method as claimed in claim 1 , further comprising bonding the substrate to a front of a magnifying lens.
11. A method as claimed in claim 1 , wherein the scintillator material is LSO.
12. A method for fabricating a scintillator system, comprising:
bonding scintillator material to a substrate;
polishing the scintillator material to a desired thickness; and
bonding the substrate to an immersion-type microscope objective.
13. A method for fabricating a scintillator system, comprising:
bonding scintillator material to a substrate; and
bonding the substrate to a microscope objective, wherein the objective is an immersion microscope objective.
14. A method as claimed in claim 13 , wherein the scintillator material is thallium doped CsI.
15. A method as claimed in claim 13 , wherein the scintillator material is LSO.