Semiconductor device
A semiconductor device comprising a ferroelectric capacitor having improved reliability is disclosed. According to one aspect of the present invention, it is provided a semiconductor device comprising a transistor formed on a semiconductor substrate, a ferroelectric capacitor formed above the transistor and comprising a lower electrode, a ferroelectric film and an upper electrode, a first hydrogen barrier film formed over the ferroelectric capacitor, an insulator formed over the first hydrogen barrier film, a contact plug disposed in the insulator and electrically connected with the upper electrode, a second hydrogen barrier film disposed between the contact plug and the insulator continuously, and a wiring connected with the contact plug.
1. A semiconductor device comprising:
a transistor formed on a semiconductor substrate;
a ferroelectric capacitor formed above the transistor and comprising a lower electrode, a ferroelectric film and an upper electrode;
a first insulator formed over the ferroelectric capacitor;
a first wiring formed above the ferroelectric capacitor;
a second insulator formed over the first wiring;
a second wiring formed above the first wiring;
a contact plug disposed in the second insulator and electrically connecting the first and second wirings;
a first hydrogen barrier film formed of an insulating film;
a barrier metal film disposed between the contact plug and the first hydrogen barrier film, the first hydrogen barrier film disposed covering side surfaces of the barrier metal film and the contact plug continuously; and
a second hydrogen barrier film formed of an insulating film, and extending to a surface of the second insulator,
wherein the first hydrogen barrier film continues to the second hydrogen barrier film, the second wiring is formed in the second insulator, and the first hydrogen barrier film is continuously disposed between the second insulator and the contact plug and between the second insulator and the second wiring.