Semiconductor fabricating apparatus with function of determining etching processing state
View Patent ↗A semiconductor fabricating apparatus for etching a semiconductor wafer, which is placed in a chamber and which has a multiple-layer film composed of a first film formed on a surface thereof and a second film formed on the first film, using plasma generated in the chamber. The semiconductor fabricating apparatus includes a light detector that detects a change in an amount of light with a plurality of wavelengths obtained from the surface of the wafer for a predetermined time during which the second film is etched, and a detection unit that detects a thickness of the first film based on a specific waveform obtained from an output of the detector.
1. A semiconductor fabricating method for etching a semiconductor wafer, comprising the steps of:
placing the semiconductor wafer having a film thereon inside of a chamber;
generating plasma inside of the chamber;
detecting a quantity of interference lights for each of at least two wavelengths obtained from a surface of the wafer for a predetermined time period during the etching of the wafer;
detecting a first time point at which the detected quantity of the interference lights for one of the two wavelengths becomes a maximum and a second time point at which the detected quantity of the interference lights for the other wavelength becomes a minimum;
determining a state of the etching based on a result of comparing a predetermined value with an interval between the first time point and the second time point, wherein both the first and second time points are detected by using outputs of a detector for detecting a quantity of the interference lights; and
controlling the etching in accordance with a result of the determining.
2. The semiconductor fabricating method according to claim 1 , further comprising the steps of:
determining a thickness of the film being etched when the interval is determined to be smaller than the predetermined value; and
wherein said controlling the etching step is performed in accordance with the results of both determining steps.
3. The semiconductor fabricating method according to claim 1 , further comprising the step of:
stopping the etching processing when the interval is determined to be smaller than the predetermined value.
4. The semiconductor fabricating method according to claim 2 , further comprising the step of:
stopping the etching processing when the interval is determined to be smaller than the predetermined value.