Self-aligned pitch reduction

1. A method providing features in a dielectric layer, comprising:

forming a sacrificial layer over the dielectric layer;

forming a patterned mask over the sacrificial layer;

etching a set of sacrificial layer features into the sacrificial layer;

shrinking the sacrificial layer features by forming a shrink deposition;

etching a first set of dielectric layer features into the dielectric layer through the sacrificial layer;

filling the features of the first set of dielectric layer features and the set of sacrificial layer features with a filler material;

removing the sacrificial layer, so that parts of the filler material remain exposed above a surface of the dielectric layer, wherein spaces are between the exposed parts of the filler material, where the spaces are in an area formerly occupied by the sacrificial layer, wherein the spaces have widths;

shrinking the widths of the spaces between the parts of the filler material with a shrink sidewall deposition;

etching a second set of dielectric layer features into the dielectric layer through the shrink sidewall deposition; and

removing the filler material and shrink sidewall deposition.

2. The method, as recited in claim 1 , further comprising removing the shrink deposition after etching the first set of dielectric layer features.

3. The method, as recited in claim 2 , wherein the removing the shrink deposition is before filling the features of the first set of dielectric layer features and the set of sacrificial layer features with the filler material.

4. The method, as recited in claim 3 , further comprising planarizing the filler material.

5. The method, as recited in claim 4 , wherein the shrinking the widths of the spaces comprises at least one shrink cycle, wherein each shrink cycle comprises:

a shrink deposition phase, which forms deposits on sidewalls of the filler material to shrink the spaces; and

a shrink profile shaping phase, which shapes the deposition on the sidewalls of the filler material.

6. The method, as recited in claim 5 , wherein the shrink deposition phase comprises:

providing a deposition gas;

forming a plasma from the deposition gas; and

stopping the flow of the deposition gas.

7. The method, as recited in claim 5 , wherein the shrink profile shaping phase comprises:

providing a profile shaping gas different than the deposition gas;

forming a plasma from the profile shaping gas; and

stopping the flow of the profile shaping gas.

8. The method, as recited in claim 7 , wherein the deposition gas comprises at least one of a hydrocarbon, fluorocarbon, and hydrofluorocarbon and the profile shaping gas comprises at least one of C x F y , NF 3, and C x H y F z .

9. The method, as recited in claim 8 , wherein the shrinking the sacrificial layer features comprises at least one shrink cycle, wherein each shrink cycle comprises:

a shrink deposition phase, which forms deposits on sidewalls of the sacrificial layer to shrink the sacrificial layer features; and

a shrink profile shaping phase, which shapes the deposition on the sidewalls of the sacrificial layer features.

10. The method, as recited in claim 9 , wherein the shrink deposition phase comprises:

providing a deposition gas;

forming a plasma from the deposition gas; and

stopping the flow of the deposition gas.

11. The method, as recited in claim 10 , wherein the shrink profile shaping phase comprises:

providing a profile shaping gas, which is different than the deposition gas;

forming a plasma from the profile shaping gas; and

stopping the flow of the profile shaping gas.

12. The method, as recited in claim 11 , wherein the deposition gas comprises at least one of a hydrocarbon, fluorocarbon, and hydrofluorocarbon and the profile shaping gas comprises at least one of C x F y , NF 3 , C x H y F z .

13. The method, as recited in claim 12 , further comprising filling the features with a conductive material.

14. The method, as recited in claim 2 , wherein the shrinking the sacrificial layer features comprises at least one shrink cycle, wherein each shrink cycle comprises:

a shrink deposition phase, which forms deposits on sidewalls of the sacrificial layer to shrink the sacrificial layer features; and

a shrink profile shaping phase, which shapes the deposition on the sidewalls of the sacrificial layer features.

15. The method, as recited in claim 1 , further comprising providing an etch stop layer between the sacrificial layer and the dielectric layer.

16. The method, as recited in claim 1 ,wherein the shrinking the widths of the spaces comprises at least one shrink cycle, wherein each shrink cycle comprises:

a shrink deposition phase, which forms deposits on sidewalls of the filler material to shrink the spaces; and

a shrink profile shaping phase, which shapes the deposition on the sidewalls of the filler material.

17. A method providing features in a dielectric layer, comprising:

forming a sacrificial layer over the dielectric layer;

forming a patterned mask over the sacrificial layer;

etching a set of sacrificial layer features into the sacrificial layer;

shrinking the sacrificial layer features by forming a shrink deposition, comprising at least one cycle, wherein each cycle comprises:

a shrink deposition phase, which forms deposits on sidewalls of the sacrificial layer features to shrink the sacrificial layer features; and

a shrink profile shaping phase, which shapes the deposition on the sidewalls of the sacrificial layer features;

etching a first set of dielectric layer features into the dielectric layer through the shrink deposition;

removing the shrink deposition;

filling the features of the first set of dielectric layer features and the set of sacrificial layer features with a filler material;

removing the sacrificial layer, so that parts of the filler material remain exposed above a surface of the dielectric layer, wherein spaces are between the exposed parts of the filler material,

where the spaces are in an area formerly occupied by the sacrificial layer, wherein the spaces have widths;

shrinking the widths of the spaces between the parts of the filler material with a shrink sidewall deposition, wherein the shrinking the widths of the spaces comprises at least one shrink cycle, wherein each shrink cycle comprises:

a shrink deposition phase, which forms deposits on sidewalls of the filler material to shrink the spaces; and

a shrink profile shaping phase, which shapes the deposition on the sidewalls of the filler material;

etching a second set of dielectric layer features into the dielectric layer through the shrink sidewall deposition; and

removing the filler material and shrink sidewall deposition.