Image sensor and method for fabricating the same
View Patent ↗An image sensor having self-aligned microlenses and a method for fabricating the same. The image sensor includes a photodiode formed in a predetermined surface of a silicon substrate, a planarization layer formed above the silicon substrate, the planarization layer having a recess in correspondence to the photodiode, and a color filter layer having a plurality of color filters formed on the planarization layer by a photolithographic process, each color filter having a convex structure. An area of a focusing lens can be maximized, and a phase signal of unfocused light is absorbed to prevent its photo-electrical conversion, thereby obtaining excellent photosensitivity.
1. An image sensor, comprising:
a photodiode formed in a predetermined surface of a silicon substrate;
a planarization layer formed above the silicon substrate, said planarization layer having a recess corresponding to the photodiode;
a color filter layer having a plurality of color filters formed directly on said planarization layer by a photolithographic process, each color filter having a convex structure; and
a plurality of microlenses formed on said color filter layer corresponding to the plurality of color filters,
wherein said plurality of microlenses is formed by means of spin coating a photoresist for the microlenses in a state which step differentials are generated by means of the convex structure after depositing the photoresist on said color filter layer.
2. The image sensor according to claim 1 , wherein said planarization layer is formed of spin-on-glass.
3. A method for fabricating an image sensor, the method comprising:
forming a photodiode in a predetermined surface of a silicon substrate;
forming a planarization layer above the silicon substrate, the planarization layer having a recess corresponding to the photodiode;
forming a color filter layer having a plurality of color filters formed directly on the planarization layer by a photolithographic process, each color filter having a convex structure; and
forming a plurality of microlenses on the color filter layer corresponding to the plurality of color filters,
wherein the step of forming the microlenses comprises:
depositing a photoresist for the microlenses on the color filter layer;
forming the microlenses by spin coating the photoresist in a state which step differentials are generated by means of the convex structure.
4. The method according to claim 3 , wherein the planarization layer is formed of spin-on-glass.