Stack structure with semiconductor chip embedded in carrier
A stack structure with semiconductor chips embedded in carriers comprises two carriers stacking together as a whole, at least two semiconductor chips having active surfaces with electrode pads and inactive surfaces corresponding thereto placed in the cavities of the carriers, at least one dielectric layer formed on the active surface of the semiconductor chip and the surface of the carrier, at least a conductive structure formed in the opening of the dielectric layer, and at least a circuit layer formed on the surface of the dielectric layer wherein the circuit layer is electrically connected to the electrode pad by the conductive structure, so as to form a three-dimensional module to increase the storage capacity dramatically and integrate the semiconductor chips in the carriers for efficiently reducing the size of the module, so that the combinations can be changed flexibly to form the required storage capacity according to the demands.
1. A stack structure with semiconductor chips embedded in carriers, comprising: two carriers having at least one cavity respectively formed thereto, wherein the carriers are stacked by a linking layer;
at least two semiconductor chips placed in the cavities of the carriers, wherein the semiconductor chips are respectively formed with an active surface having a plurality of electrode pads and an inactive surface corresponding thereto;
at least one dielectric layer formed on the active surface of the semiconductor chip and the surface of the carrier, wherein at least an opening is formed in the dielectric layer at a position corresponding to the top of the electrode pad; and
at least one circuit layer formed on the surface of the dielectric layer and at least a conductive structure formed in the opening of the dielectric layer, wherein the circuit layer is electrically connected to the electrode pad of the semiconductor chip by the conductive structure.
2. The structure of claim 1 , wherein the carrier is at least one of an insulating board and a circuit board having circuits.
3. The structure of claim 1 , wherein the cavity of the carrier is a non-through cavity or a through cavity.
4. The structure of claim 3 , wherein the carrier has a first surface and a second surface.
5. The structure of claim 4 , wherein the cavity of the carrier is formed on at least one of the group of the first surface and the group of the second surface.
6. The structure of claim 5 , wherein the carrier stacks the first surface thereof to the second surface of another carrier in the same direction.
7. The structure of claim 5 , wherein the carrier stacks the second surface thereof to the second surface of another carrier in a vertically opposite direction.
8. The structure of claim 5 , wherein the carriers stacks the first surface thereof to the first surface of another carrier in a vertically opposite direction.
9. The structure of claim 1 , wherein the linking layer is an organic adhesive material.
10. The structure of claim 1 , further comprising at least one plated through hole penetrating through the dielectric layer, the circuit layer, the linking layer and two carriers, so as to electrically connect the semiconductor chips.
11. The structure of claim 10 , further comprising at least one circuit build-up structure formed on the surface of the dielectric layer and the circuit layer, wherein a plurality of conductive structures are formed in the circuit build-up structure for electrically connecting to the circuit layer and a plurality of connecting pads are formed on the surface of the circuit build-up structure.
12. The structure of claim 11 , further comprising a solder mask layer formed on the circuit build-up structure with at least one opening formed on the surface of the solder mask layer located at the edge of the stack structure, so as to expose the electrically connecting pads of the circuit layer formed on the surface of the circuit build-up structure that are used to connect other electric devices.
13. The structure of claim 12 , wherein the circuit build-up structure comprises a dielectric layer, a circuit layer stacked thereon and a plurality of conductive structures formed therein.