Substrate processing apparatus
A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a development processing block, a drying processing block, and an interface block. An exposure device is arranged adjacent to the interface block. The drying processing block comprises a drying processing group. The interface block comprises an interface transport mechanism. A substrate is subjected to exposure processing by the exposure device, and subsequently transported to the drying processing group by the interface transport mechanism. The substrate is subjected to cleaning and drying processing by the drying processing group.
1 . A substrate processing apparatus that is arranged adjacent to an exposure device, comprising:
a processing section for applying processing to a substrate; and
an interface that is provided on one end of said processing section for exchanging the substrate between said processing section and said exposure device, wherein
said processing section comprises:
a first processing block that includes a first processing unit that forms a photosensitive film made of a photosensitive material on the substrate, a first thermal processing unit that thermally treats the substrate, and a first transport unit that transports the substrate;
a second processing block that includes a second processing unit that applies drying processing to the substrate after the exposure processing by said exposure device, a second thermal processing unit that thermally treats the substrate, and a second transport unit that transports the substrate; and
a third processing block that includes a third processing unit that applies development processing to the substrate after the drying processing by said second processing unit, a third thermal processing unit that thermally treats the substrate, and a third transport unit that transports the substrate, wherein
said second processing block is arranged adjacent to said interface.
2 . The substrate processing apparatus according to claim 1 , wherein
said second processing unit dries the substrate by supplying an inert gas onto the substrate.
3 . The substrate processing apparatus according to claim 1 , wherein
said processing section comprises a fourth processing block that includes a fourth processing unit that forms an anti-reflection film on the substrate before the formation of said photosensitive film by said first processing unit, a fourth thermal processing unit that thermally treats the substrate, and a fourth transport unit that transports the substrate.
4 . The substrate processing apparatus according to claim 3 , further comprising an indexer that is arranged on another end of said processing section and carries in and out the substrate to and from said processing section, wherein
said fourth processing block is arranged adjacent to said indexer.
5 . The substrate processing apparatus according to claim 1 , wherein
said interface further includes:
a fifth processing unit that applies given processing to the substrate;
a platform on which the substrate is temporarily mounted;
a fifth transport unit that transports the substrate between said processing section, said fifth processing unit, and said platform; and
a sixth transport unit that transports the substrate between said platform, said exposure device, and said second processing unit, and
said sixth transport unit transports the substrate that has been carried out of said exposure device to said second processing unit.
6 . The substrate processing apparatus according to claim 5 , wherein
said sixth transport unit includes a first holder and a second holder each for holding the substrate,
said sixth transport unit holds the substrate with said first holder during the transport of the substrate from said platform to said exposure device and from said second processing unit to said platform,
said sixth transport unit holds the substrate with said second holder during the transport of the substrate from said exposure device to said second processing unit.
7 . The substrate processing apparatus according to claim 6 , wherein
said second holder is provided below said first holder.
8 . The substrate processing apparatus according to claim 5 , wherein
said fifth processing unit includes an edge exposure unit for subjecting a peripheral portion of the substrate to exposure processing.
9 . The substrate processing apparatus according to claim 1 , wherein
said second processing unit further applies the cleaning processing to the substrate before the drying processing to the substrate.
10 . The substrate processing apparatus according to claim 9 , wherein
said second processing unit comprises:
a substrate holding device that holds the substrate substantially horizontally;
a rotation-driving device that rotates the substrate held on said substrate holding device about an axis vertical to the substrate;
a cleaning liquid supplier that supplies a cleaning liquid onto the substrate held on said substrate holding device; and
an inert gas supplier that supplies an inert gas onto the substrate after the cleaning liquid has been supplied onto the substrate by said cleaning liquid supplier.
11 . The substrate processing apparatus according to claim 10 , wherein
said inert gas supplier supplies the inert gas so that the cleaning liquid supplied onto the substrate by said cleaning liquid supplier is removed from the substrate as the cleaning liquid moves outwardly from the center of the substrate.
12 . The substrate processing apparatus according to claim 10 , wherein
said second processing unit further comprises a rinse liquid supplier that supplies a rinse liquid onto the substrate after the supply of the cleaning liquid by said cleaning liquid supplier and before the supply of the inert gas by said inert gas supplier.
13 . The substrate processing apparatus according to claim 12 , wherein
said inert gas supplier supplies the inert gas so that the rinse liquid supplied onto the substrate by said rinse liquid supplier is removed from the substrate as the rinse liquid moves outwardly from the center of the substrate.
14 . A substrate processing apparatus that is arranged adjacent to an exposure device comprising:
a processing section for applying processing to a substrate; and
an interface that is provided on one end of said processing section for exchanging the substrate between said processing section and said exposure device, wherein
said processing section comprise:
a first processing block that includes a first processing unit that forms a photosensitive film made of a photosensitive material on the substrate, a first thermal processing unit that thermally treats the substrate, and a first transport unit that transports the substrate;
a second processing block that includes a second processing unit that cleans the substrate with a fluid nozzle that supplies a fluid mixture containing a liquid and a gas onto the substrate after the exposure processing by said exposure device, a second thermal processing unit that thermally treats the substrate, and a second transport unit that transports the substrate; and
a third processing block that includes a third processing unit that applies development processing to the substrate after the cleaning processing by said second processing unit, a third thermal processing unit that thermally treats the substrate, and a third transport unit that transports the substrate,
said second processing block is arranged adjacent to said interface.
15 . The substrate processing apparatus according to claim 14 , wherein
said second processing unit applies cleaning processing to the substrate by supplying a fluid mixture containing an inert gas and a cleaning liquid onto the substrate from said fluid nozzle.
16 . The substrate processing apparatus according to claim 14 , wherein
said second processing unit applies drying processing to the substrate after the cleaning processing to the substrate.
17 . The substrate processing apparatus according to claim 16 , wherein
said second processing unit includes an inert gas supplier that applies drying processing to the substrate by supplying an inert gas onto the substrate.
18 . The substrate processing apparatus according to claim 17 , wherein
said fluid nozzle functions as the inert gas supplier.
19 . The substrate processing apparatus according to claim 17 , wherein
said second processing unit further includes:
a substrate holding device that holds the substrate substantially horizontally; and
a rotation-driving device that rotates the substrate held on said substrate holding device about an axis vertical to the substrate.
20 . The substrate processing apparatus according to claim 17 , wherein
said second processing unit supplies the inert gas so that the fluid mixture supplied onto the substrate from said fluid nozzle is removed from the substrate as the fluid mixture moves outwardly from the center of the substrate.
21 . The substrate processing apparatus according to claim 17 , wherein
said second processing unit further includes a rinse liquid supplier that supplies a rinse liquid onto the substrate, after the supply of the fluid mixture from said fluid nozzle and before the supply of the inert gas from said inert gas supplier.
22 . The substrate processing apparatus according to claim 21 , wherein
said fluid nozzle functions as said rinse liquid supplier.
23 . The substrate processing apparatus according to claim 21 , wherein
said second processing unit supplies the inert gas so that the rinse liquid supplied onto the substrate from said rinse liquid supplier is removed from the substrate as the rinse liquid moves outwardly from the center of the substrate.
24 . The substrate processing apparatus according to claim 14 , wherein
said fluid nozzle has a liquid flow passage through which a liquid flows, a gas flow passage through which a gas flows, a liquid discharge port having an opening that communicates with said liquid flow passage, and a gas discharge port that is provided near said liquid discharge port and has an opening that communicates with said gas flow passage.