Method for fabricating a semi-transmissive reflector plate
The method for fabricating reflector plate for a reflective liquid crystal display and the device is disclosed. The present invention includes the formation of a protection layer over the glass substrate having thin film transistors and a layer of transparent electrodes on top, followed by the formation of a layer of undulating resin over the protection layer. If the reflector plate to be produced is a semi-transmissive type, a light-transmitting region is created over the protection layer. Since the protection layer is created in advance of the undulating resin outgrowth, the present method can effectively prevent reflection from the exposure stage during the lithography process, thus the problem of abnormal pattern marks occurring on the reflective surface can be avoided, and the exposure time and the production yield are enhanced.
1. A method for fabricating a semi-transmissive type reflector plate of a reflective liquid crystal display, the method comprising acts of:
preparing a glass substrate with thin film transistors built on a surface of the glass substrate;
forming transparent electrodes over the glass substrate after the thin film transistors are built on the glass substrate;
depositing a protection layer over the transparent electrodes;
patterning the transparent electrodes and the protection layer to form pixel patterns;
spin coating a photoresist layer over the protection layer;
removing the photoresist layer over non-patterned areas;
etching the protection layer on the non-patterned areas to create a light-transmitting region;
depositing a reflective metal film over the photoresist layer retained on the glass substrate;
wherein after the protection layer is deposited over the transparent electrodes, the protection layer shields undesired reflection light during an exposure stage and reduces the exposure time.
2. The method as claimed in claim 1 , wherein the protection layer is metal material.
3. The method as claimed in claim 1 , wherein the protection layer is non-metal material.