Method for fabricating memory cell
View Patent ↗A memory cell structure comprises a semiconductor substrate, two stack structures positioned on the semiconductor substrate, two conductive spacers positioned on sidewalls of the two stack structures, a gate oxide layer covering a portion of the semiconductor substrate between the two conductive spacers and a gate structure positioned at least on the gate oxide layer. Particularly, each of two stack structures includes a first oxide block, a conductive block and a second oxide block, and the two conductive spacers are positioned at on the sidewall of the two conductive blocks of the two stack structures. The two conductive spacers are preferably made of polysilicon, and have a top end lower than the bottom surface of the second oxide block. In addition, a dielectric spacer is positioned on each of the two conductive spacers.
1. A method for fabricating a memory cell structure, comprising steps of:
forming two stack structures on a semiconductor substrate, wherein each of the stack structures includes a first oxide block, a source/drain block and a second oxide block;
forming two conductive spacers on sidewalls of the two stack structures;
forming a gate oxide layer covering a portion of the semiconductor substrate between the two conductive spacers and a carrier channel in a portion of the semiconductor substrate below the gate oxide layer between the two stack structures; and
forming a gate structure at least on the gate oxide layer.
2. The method for fabricating a memory cell structure of claim 1 , wherein the step of forming two conductive spacers on sidewalls of the two stack structures comprises:
depositing a polysilicon layer on the semiconductor substrate; and
performing an etching process to remove a portion of the polysilicon layer to form the two conductive spacers.
3. The method for fabricating a memory cell structure of claim 2 , wherein the etching process is an anisotropic etching process.
4. The method for fabricating a memory cell structure of claim 1 , further comprising a step of forming two dielectric spacers on the two conductive spacers before the step of forming a gate oxide layer.
5. The method for fabricating a memory cell structure of claim 1 , wherein the step of forming two conductive spacers on sidewalls of the two stack structures comprises:
depositing a polysilicon layer on the semiconductor substrate;
forming a dielectric spacer on the polysilicon layer; and
removing a portion of the polysilicon layer uncovered by the dielectric spacer to form the two conductive spacers.
6. The method for fabricating a memory cell structure of claim 5 , wherein the step of removing a portion of the polysilicon layer is performed by an etching process using the dielectric spacer as an etching mask.
7. The method for fabricating a memory cell structure of claim 1 , further comprising a step of forming a recess in the semiconductor substrate between the two conductive spacers before the gate oxide layer is formed.
8. The method for fabricating a memory cell structure of claim 7 , wherein the recess is formed by an etching process.
9. The method for fabricating a memory cell structure of claim 1 , wherein the step of forming two stack structures on a semiconductor substrate comprises:
forming a first oxide layer on the semiconductor substrate;
forming a conductive layer on the first oxide layer;
forming a second oxide layer on the conductive layer;
forming a photoresist layer with a first opening on the second oxide layer; and
performing a first etching process to remove a portion of the second oxide layer, the conductive layer and the first oxide layer to form the two stack structures.