Method of fabricating CMOS image sensor
View Patent ↗A method of fabricating a CMOS image sensor is provided, in which a trapezoidal microlens pattern profile is formed to facilitate reflowing the microlens pattern and by which a curvature of the microlens may be enhanced to raise its light-condensing efficiency. The method includes forming a plurality of photodiodes on a semiconductor substrate; forming an insulating interlayer on the semiconductor substrate including the photodiodes; forming a protective layer on the insulating interlayer; forming a plurality of color filters corresponding to the photodiodes; forming a top coating layer on the color filters; forming a microlens pattern on the top coating layer; and forming a plurality of microlenses by reflowing the microlens pattern.
1. A method of fabricating a CMOS image sensor, comprising:
forming a plurality of photodiodes on or in a semiconductor substrate;
forming an insulating interlayer on the semiconductor substrate including the photodiodes;
forming a protective layer on the insulating interlayer;
forming a plurality of color filters corresponding to the plurality of photodiodes, wherein forming a plurality of color filters comprises forming a plurality of indented portions on a boundary of each of the plurality of color filters;
forming a top coating layer on the plurality of color filter layers;
forming a microlens pattern on the top coating layer corresponding to the color filters; and
forming a plurality of microlenses by reflowing the microlens pattern.
2. The method of claim 1 , wherein forming to microlens pattern comprises patterning an oxide layer or a resist layer.
3. The method of claim 1 , comprising forming a plurality of indented portions on a plurality of boundaries of each of the plurality of color filters.
4. The method of claim 1 , further comprising the step of hardening the microlens by applying UV radiation thereto.
5. The method of claim 1 , wherein the plurality of color filters are formed on the protective layer.
6. The method of claim 1 , wherein the microlens pattern comprises a plurality of pre-microlens bodies having a trapezoidal cross-section.
7. A method of fabricating a CMOS image sensor, comprising:
forming a plurality of color filters on an insulating interlayer on a semiconductor substrate, the semiconductor substrate including a plurality of photodiodes therein, and each color filter comprising a plurality of indented portions on a plurality of boundaries thereof;
forming a coating layer on the plurality of color filters;
forming a microlens pattern on the coating layer; and
reflowing the microlens pattern to form a plurality of microlenses, each microlens corresponding to a unique color filter.
8. The method of claim 7 , wherein forming the microlens pattern comprises patterning a resist layer.
9. The method of claim 7 , wherein the microlens pattern comprises a plurality of pre-microlens bodies having a trapezoidal cross-section.
10. The method of claim 8 , further comprising the step of hardening the microlens by applying UV radiation thereto.
11. The method of claim 7 , further comprising the step of forming a protective layer on the insulating interlayer, the plurality of color filters being formed on the protective layer.
12. The method of claim 7 , wherein forming the microlens pattern comprises passing UV radiation through a diffraction mask onto a microlens material deposited on the coating layer.