Method for forming metal line of semiconductor device
View Patent ↗A method for forming a metal line of a semiconductor device forms an aluminum line having an excellent orientation. A specific resistance of a metal line is reduced, thereby enabling sufficient supply of a desired electric current. The method includes steps of forming a lower reflection preventing layer on a silicon wafer, forming a first aluminum layer on the lower reflection preventing layer, forming a second aluminum layer on the first aluminum layer, lowering a surface roughness of the second aluminum layer, forming an upper reflection preventing layer on the second aluminum layer, and forming an aluminum line.
1. A method for forming a metal line of a semiconductor device, comprising:
forming a lower reflection preventing layer on a silicon wafer;
forming a first aluminum layer on the lower reflection preventing layer by sputtering using a helium plasma;
forming a second aluminum layer on the first aluminum layer by sputtering using a plasma of one of krypton, xenon, radon, and any combination thereof;
lowering a surface roughness of the second aluminum layer;
forming an upper reflection preventing layer on the second aluminum layer; and
forming an aluminum line by selectively etching the upper reflection preventing layer, second aluminum layer, first aluminum layer, and lower reflection preventing layer.
2. The method according to claim 1 , wherein the sputtering is performed at a pressure of not more than 0.1 mTorr.
3. The method according to claim 1 , wherein the sputtering is performed while a distance of about 20 mm is maintained between a target and the wafer.
4. The method according to claim 1 , wherein the first aluminum layer has a thickness of approximately 20% to 30% of a combined thickness of the first aluminum layer and the second aluminum layer.
5. The method according to claim 1 , wherein the second aluminum layer has a thickness of approximately 70% to 80% of a combined thickness of the first aluminum layer and the second aluminum layer.
6. The method according to claim 1 , wherein the sputtering is performed at a pressure of at least 5 mTorr.
7. The method according to claim 1 , wherein the sputtering is performed after narrowing a distance between a target and the wafer to about 5 mm.
8. The method according to claim 1 , wherein lowering the surface roughness is performed by back-etching over an entire surface of the second aluminum layer, using a plasma of one of neon and a mixture of neon and helium.
9. A method for forming a metal line of a semiconductor device, comprising:
forming a lower reflection preventing layer on a silicon wafer;
forming a first aluminum layer on the lower reflection preventing layer by sputtering using helium plasma;
forming a second aluminum layer on the first aluminum layer by sputtering using a plasma of one of krypton, xenon, radon, and any combination thereof;
lowering a surface roughness of the second aluminum layer;
forming an upper reflection preventing layer on the second aluminum layer; and
forming an aluminum line.