Method for fabricating a semiconductor device
View Patent ↗The method includes chemical-mechanical polishing to planarize an insulating interlayer deposited on a lower pattern. The insulating interlayer is polished using a surfactant. The chemical-mechanical polishing includes at least two separate polishing steps of different fluxes of the surfactant. The first polishing step is performed for touching up an upper side of the insulating layer. The second polishing step is performed, after completing the first polishing step, for planarizing the insulating interlayer.
1. A method for fabricating a semiconductor device, comprising:
depositing an insulating interlayer on a lower pattern;
chemical-mechanical polishing the insulating interlayer using a surfactant, said chemical-mechanical polishing including at least two separate polishing steps using different fluxes of the surfactant,
wherein the at least two separate polishing steps include a first polishing step for touching up an upper side of the insulating interlayer using a first flux of the surfactant and a second polishing step for planarizing the insulating interlayer using a second flux of the surfactant,
wherein the first flux of the surfactant is greater than the second flux of the surfactant.
2. The method as claimed in claim 1 , wherein the second polishing step is performed after the first polishing step.
3. The method as claimed in claim 1 , wherein the first flux of the surfactant is about 10 ml per minute and wherein the second flux of the surfactant is about 6.5 ml per minute.
4. The method as claimed in claim 3 , wherein the first polishing step is performed for 200 seconds and wherein the second polishing step is performed for 100 seconds.
5. The method as clamed in claim 4 , wherein the surfactant is TK.
6. A method for fabricating a semiconductor device, comprising:
depositing an insulating interlayer on a lower pattern, the insulating interlayer comprising a first portion of high density and a second portion of low density;
a first polishing step for touching up an upper side of the insulating interlayer; and
a second polishing step for planarizing the insulating interlayer,
wherein the first and second polishing steps are performed using different values of flux of a surfactant in order to decrease a difference of thickness between the first portion and the second portion,
wherein a first flux of the surfactant for the first polishing step is greater than a second flux of the surfactant for the second polishing step.
7. The method as claimed in claim 6 , wherein said first and second polishing steps perform chemical-mechanical polishing of the insulating interlayer.
8. The method as darned in claim 6 , further comprising:
forming a contact plug in the planarized insulating interlayer using photolithography of a contact hole etching process.