CMOS image sensor and method for manufacturing the same
View Patent ↗A CMOS image sensor and a method for manufacturing the same improves photosensitivity and prevent loss of light by forming a photo-sensing unit under a color filter. The CMOS image sensor may include a plurality of transistors formed on a semiconductor substrate, a metal line formed over the plurality of transistors for electrically connecting the plurality of transistors, and a plurality of photodiodes electrically connected with the plurality of transistors and formed over the metal line.
1. A method for manufacturing a CMOS image sensor comprising:
forming a plurality of transistors on a semiconductor substrate;
forming a metal line over the plurality of transistors for electrically connecting the plurality of transistors;
forming a plurality of photodiodes over the metal line;
forming a color filter on the plurality of photodiodes;
forming a planarization layer on the color filter; and
forming a micro-lens on the planarization layer.
2. The method of claim 1 , further comprising:
forming a metal dielectric layer over at least one of the plurality of transistors before forming the plurality of photodiodes.
3. The method of claim 2 , wherein forming the plurality of photodiodes comprises:
forming a through-hole through the metal dielectric layer to a gate electrode of the at least one of the plurality of transistors;
forming a plug by filling the through-hole with a conductive material;
depositing a silicon layer on the metal dielectric layer;
forming a photoresist pattern for exposing a portion that corresponds to the plug on the silicon layer; and
implanting P-type and N-type impurity ions into the silicon layer using the photoresist pattern as a mask.
4. The method of claim 3 , further comprising:
forming an isolation region between each of the plurality of photodiodes.
5. The method of claim 1 , further comprising:
forming a first metal dielectric layer between the plurality of transistors and the metal line; and
forming a second metal dielectric layer between the metal line and the plurality of photodiodes.