IP Library Granted Patent US 7,442,572
Granted Patent B2
US 7,442,572 · App. 11/319,487 · Granted Oct 28, 2008

CMOS image sensor and method for manufacturing the same

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Quick Facts
Patent No.
US 7,442,572
App. No.
11/319,487
Granted
Oct 28, 2008
Kind
B2
Abstract

A CMOS image sensor and a method for manufacturing the same improves photosensitivity and prevent loss of light by forming a photo-sensing unit under a color filter. The CMOS image sensor may include a plurality of transistors formed on a semiconductor substrate, a metal line formed over the plurality of transistors for electrically connecting the plurality of transistors, and a plurality of photodiodes electrically connected with the plurality of transistors and formed over the metal line.

Claims (20)

1. A method for manufacturing a CMOS image sensor comprising:

forming a plurality of transistors on a semiconductor substrate;

forming a metal line over the plurality of transistors for electrically connecting the plurality of transistors;

forming a plurality of photodiodes over the metal line;

forming a color filter on the plurality of photodiodes;

forming a planarization layer on the color filter; and

forming a micro-lens on the planarization layer.

2. The method of claim 1 , further comprising:

forming a metal dielectric layer over at least one of the plurality of transistors before forming the plurality of photodiodes.

3. The method of claim 2 , wherein forming the plurality of photodiodes comprises:

forming a through-hole through the metal dielectric layer to a gate electrode of the at least one of the plurality of transistors;

forming a plug by filling the through-hole with a conductive material;

depositing a silicon layer on the metal dielectric layer;

forming a photoresist pattern for exposing a portion that corresponds to the plug on the silicon layer; and

implanting P-type and N-type impurity ions into the silicon layer using the photoresist pattern as a mask.

4. The method of claim 3 , further comprising:

forming an isolation region between each of the plurality of photodiodes.

5. The method of claim 1 , further comprising:

forming a first metal dielectric layer between the plurality of transistors and the metal line; and

forming a second metal dielectric layer between the metal line and the plurality of photodiodes.

Assignments (2)
CHANGE OF NAME Recorded Jun 15, 2006
From: DONGBUANAM SEMICONDUCTOR INC.
To: DONGBU ELECTRONICS CO., LTD.
Reel/Frame 018176/0351 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2005
From: SOHN, HYUN JOON
To: DONGBUANAM SEMICONDUCTOR INC.
Reel/Frame 017387/0806 →