CMOS image sensor and method for fabricating the same
View Patent ↗A CMOS image sensor and a method for fabricating the same prevent a lifting effect of microlenses. Also, a diffused reflection of microlenses is prevented. The CMOS image sensor includes photodiodes, an interlayer insulating layer, metal lines formed in the interlayer insulating layer to electrically connect the respective photodiodes with each other, an oxide layer, a passivation layer to protect the CMOS image sensor from external sources, and microlenses formed to pass through the passivation layer at portions corresponding to the photodiodes.
1. A CMOS image sensor comprising:
photodiodes formed in a semiconductor substrate;
an interlayer insulating layer formed on the semiconductor substrate;
metal lines formed in the interlayer insulating layer to electrically connect the respective photodiodes with each other;
an oxide layer formed on the interlayer insulating layer;
a passivation layer dividedly formed on the oxide layer; and
microlenses formed on the oxide layer below the passivation layer, wherein the microlenses are formed on portions corresponding to the photodiodes.
2. The CMOS image sensor of claim 1 , further comprising:
an opaque layer formed on the divided passivation layer.
3. The CMOS image sensor of claim 1 , wherein the semiconductor substrate includes a first epitaxial layer, a second epitaxial layer formed on the first epitaxial layer, and a third epitaxial layer formed on the second epitaxial layer.
4. The CMOS image sensor of claim 3 , wherein the photodiodes include a red photodiode formed in the first epitaxial layer, a green photodiode formed in the second epitaxial layer, and a blue photodiode formed in the third epitaxial layer.
5. The CMOS image sensor of claim 1 , wherein the passivation layer is a nitride layer.
6. A method for fabricating a CMOS image sensor comprising:
forming photodiodes in a semiconductor substrate;
forming an interlayer insulating layer on the semiconductor substrate;
forming metal lines in the interlayer insulating layer to electrically connect the respective photodiodes with each other;
forming an oxide layer on the interlayer insulating layer;
forming a passivation layer on the oxide layer;
selectively etching the passivation layer to expose the oxide layer corresponding to the photodiodes; and
forming microlenses on the oxide layer on portions corresponding to the photodiodes.
7. The method of claim 6 , further comprising forming an opaque layer on the passivation layer.
8. The method of claim 7 , wherein the step of forming the microlenses includes forming open areas by selectively etching the opaque layer and the passivation layer to expose a portion of the oxide layer corresponding to the photodiodes, and forming microlens patterns in the open areas.
9. The method of claim 8 , wherein the step of forming the microlens patterns includes coating a photoresist layer on the opaque layer including the open areas, and forming photoresist patterns in the open areas by selectively exposing and developing the photoresist layer.
10. The method of claim 9 , further comprising simultaneously forming and sintering processes to form microlenses from the photoresist patterns.
11. The method of claim 6 , wherein the step of forming the photodiodes includes forming a first epitaxial layer in the semiconductor substrate, forming a red photodiode in the first epitaxial layer, forming a second epitaxial layer on the first epitaxial layer including the red photodiode, forming a green photodiode in the second epitaxial layer, forming a third epitaxial layer on the second epitaxial layer including the green photodiode, and forming a blue photodiode in the third epitaxial layer.
12. The method of claim 6 , wherein the passivation layer is a nitride layer.