CMOS image sensor and method for manufacturing the same
A CMOS image sensor includes a plurality of photodiodes in a semiconductor substrate; an insulating interlayer on the semiconductor substrate including the plurality of photodiodes; a metal line in the insulating interlayer; a passivation layer on the insulating interlayer; an adhesive layer on the passivation layer; and a plurality of micro-lenses on the adhesive layer.
1 . A CMOS image sensor comprising:
a plurality of photodiodes in a semiconductor substrate;
an insulating interlayer on the semiconductor substrate, including the plurality of photodiodes;
a metal line in the insulating interlayer;
a passivation layer on the insulating interlayer;
an adhesive layer on the passivation layer; and
a plurality of microlenses on the adhesive layer.
2 . The CMOS image sensor of claim 1 , wherein the adhesive layer is formed with an overcoating layer which is similar in properties to the microlenses.
3 . The CMOS image sensor of claim 1 , wherein the adhesive layer is formed with an oxide layer.
4 . The CMOS image sensor of claim 1 , wherein the passivation layer includes an oxide layer formed on the insulating interlayer and a nitride layer formed on the oxide layer.
5 . A method for manufacturing a CMOS image sensor comprising:
forming a plurality of photodiodes in a semiconductor substrate;
forming an insulating interlayer on the semiconductor substrate, including the plurality of photodiodes;
forming a metal line in the insulating interlayer;
forming a passivation layer on the insulating interlayer;
forming an adhesive layer on the passivation layer; and
forming a plurality of microlenses on the adhesive layer.
6 . The method of claim 5 , wherein the adhesive layer is formed with an overcoating layer which is similar in properties to the microlenses.
7 . The method of claim 5 , wherein the adhesive layer is formed with an oxide layer.
8 . The method of claim 5 , wherein the process of forming the passivation layer includes the steps of forming an oxide layer on the insulating interlayer, and forming a nitride layer on the oxide layer.