CMOS image sensor and method for manufacturing the same
View Patent ↗A CMOS image sensor and a method for manufacturing the same are disclosed, in which a blue photodiode is imparted with a greater thickness to improve sensitivity of blue light. The blue photodiode of a CMOS image sensor includes a first lightly doped P-type epitaxial layer formed on a heavily doped P-type semiconductor substrate; a gate electrode of a transfer transistor formed on the first epitaxial layer; a first N-type blue photodiode region formed on the first epitaxial layer; and a second N-type blue photodiode region formed on the first epitaxial layer corresponding to the first blue photodiode region.
1. A method for manufacturing a CMOS image sensor, comprising:
forming a first lightly doped P-type epitaxial layer on a heavily doped P-type semiconductor substrate;
forming a gate electrode on the first epitaxial layer;
forming a first N-type blue photodiode region on the first epitaxial layer;
forming a second N-type epitaxial layer on the first epitaxial layer including the first blue photodiode region; and
forming a second N-type blue photodiode region by patterning the second epitaxial layer to remain only on the first blue photodiode region.
2. The method of claim 1 , wherein the second blue photodiode region is formed to a thickness of 300 Å to 5000 Å.
3. A method for manufacturing a CMOS image sensor, comprising:
forming a first lightly doped P-type epitaxial layer on a heavily doped P-type semiconductor substrate;
forming a gate electrode on the first epitaxial layer;
forming a first N-type blue photodiode region on the first epitaxial layer;
forming a dielectric film on the first epitaxial layer including the first blue photodiode region;
patterning the dielectric film to expose the first blue photodiode region; and
forming a second blue photodiode region by forming a second N-type epitaxial layer on the first epitaxial layer corresponding to the first blue photodiode region.
4. The method of claim 3 , wherein the second blue photodiode region is formed to a thickness of 300 Å to 5000 Å.