Method of forming a gate of a flash memory device
View Patent ↗The present invention provides a method of forming a gate in a flash memory device. The method includes: forming a oxide layer on a semiconductor substrate; forming a stacked structure including a tunnel oxide layer, a floating gate, a dielectric layer, and a control gate by patterning them on the semiconductor substrate; exposing portions of the semiconductor substrate below the field oxide layer by selectively etching the field oxide layer adjacent to the source region in order to form a common source; performing subsequent etching for removing oxides between the control gates; and forming an oxide layer covering the semiconductor substrate and both sidewalls of the floating gate and control gate.
1. A method of forming a gate in a flash memory device, comprising:
forming a field oxide layer on a semiconductor substrate; and then
forming a stacked structure including a tunnel oxide layer, a floating gate, a dielectric layer, and a control gate on the semiconductor substrata including the field oxide layer by patterning them; and then
forming a trench in order to form a common source by selectively etching the field oxide layer a source region to expose portions of the semiconductor substrata below the field oxide layer; and then
performing subsequent etching for removing oxides after selectively etching the field oxide layer; and then
forming an oxide layer having a uniform thickness coveting an inner wall of the trench, both sidewalls of the floating gate and the control gate, and upper portions of the control gate,
wherein the subsequent etching is an isotropic dry etching.
2. The method of claim 1 , further comprising, before performing the subsequent etching, forming a common source by forming an N + diffusion layer through ion implantation.
3. The method of claim 1 , wherein the forming of the oxide layer is performed by RTA (Rapid Thermal Annealing) at a temperature of about 1050° C.
4. A method of forming a gate in a flash memory device comprising:
forming a field oxide layer on a semiconductor substrate; and then
forming a tunnel oxide layer, a floating gate, a dielectric layer, and a control gate on the semiconductor substrate including the field oxide layer; and then
forming a trench in the field oxide layer; and then
forming a common source in the semiconductor substrate by forming an N + diffusion layer;
removing oxides after forming the trench by performing an isotropic dry etching process; and then
forming an oxide layer having a uniform thickness covering sidewalls of the trench, sidewalls of the floating gate and the control gate, and upper portions of the control gate.
5. A method of forming a gate in a flash memory device comprising:
forming a field oxide layer on a semiconductor substrate; and then
forming a tunnel oxide layer, a floating gate, a dielectric layer, and a control gate on the semiconductor substrate including the field oxide layer; and then
forming a trench in the field oxide layer exposing a portion of the semiconductor substrate in order to form a common source below the field oxide layer; and then
removing oxides after forming the trench by performing a dry etching process using a reaction gas including carbon tetrafluoride (CF 4 ) gas and nitrogen gas (N 2 ); and then
forming an oxide layer having a uniform thickness covering sidewalls of the trench, sidewalls of the floating gate and the control gate, and upper portions of the control gate.