Flash memory device and method for fabricating the same
View Patent ↗A flash memory device includes a floating gate formed with a byproduct, such as a polymer, generated in an etching process. The flash memory device is configured to minimize the unstableness often caused by a floating gate that includes direct contact between polymer and polysilicon. Formation of the floating gate includes forming a tunneling oxide layer, a conductive layer and an insulating layer on a semiconductor substrate. Portions of the insulating layer are removed using a photoresist pattern defining a floating gate area as a mask. Thermal oxide layers are formed on a surface of the conductive layer from which the insulating layer was removed. Polymer materials are included on sides of the respective photoresist pattern and insulating layer. A floating gate is formed by selectively removing portions of the thermal oxide layer and the conductive layer using the photoresist and the polymer materials as a mask.
1. A method for fabricating a flash memory device comprising:
sequentially forming a tunneling oxide layer, a conductive layer and an insulating layer on a semiconductor substrate;
forming a photoresist pattern for defining a floating gate area on the insulating layer;
selectively removing the insulating layer using the photoresist pattern as a mask;
forming thermal oxide layers on a surface of the conductive layer from which the insulating layer is removed;
forming polymer materials on sides of the respective photoresist pattern and insulating layer; and
forming a floating gate by selectively removing a portion of the thermal oxide layers and the conductive layer using the photoresist and the polymer materials as a mask.
2. The method of claim 1 , wherein the polymer materials are formed on sides of the photoresist with plasma generated by fluorine gases including carbon on a surface of the photoresist pattern.
3. The method of claim 2 , wherein the fluorine gases including carbon comprises CH 2 F 2 or C 4 F 8 /C 5 F 8 .
4. The method of claim 1 , wherein the conductive layer and the insulating layer are etched by plasma.
5. The method of claim 1 , further comprising:
removing the photoresist pattern, the insulating layer, the thermal oxide layers and the polymer materials;
forming an insulating interlayer on an entire surface of the semiconductor substrate including the floating gate; and
forming a control gate on the insulating interlayer.
6. The method of claim 1 , further comprising:
removing the photoresist pattern, the insulating layer and the polymer materials;
forming an insulating interlayer on an entire surface of the semiconductor substrate including the thermal oxide layer and the floating gate; and
forming a control gate on the insulating interlayer.