FeRAM device and method for manufacturing the same
An embodiment of the FeRAM includes a ferroelectric capacitor including a bottom electrode, a ferroelectric layer, and a top electrode. Strontium ruthenium oxide is formed between the bottom electrode and the ferroelectric layer and between the ferroelectric layer and the top electrode. A diffusion barrier layer including strontium ruthenium oxide and iridium is formed between the top electrode and a direct cell contact plug coupled to a plate line interconnecting top electrodes of ferroelectric capacitors. Thus, diffusion of nitrogen or metallic materials produced in subsequent processes is suppressed to prevent degradation of the ferroelectric layer.
1. A semiconductor device comprising:
a ferroelectric capacitor including a bottom electrode, a ferroelectric layer, and a top electrode which are sequentially stacked on a semiconductor substrate;
an insulation layer formed on the ferroelectric capacitor and including a contact hole exposing a portion of the top electrode of the ferroclectric capacitor;
a diffusion barrier layer including a strontium ruthenium oxide layer and an iridium layer formed in the contact hole, wherein the strontium ruthenium oxide layer is formed on a portion of the top electrode exposed by the contact hole and the iridium layer is formed on the strontium ruthenium oxide layer; and
a plug material formed on the iridium layer to fill the contact hole.
2. The device of claim 1 , wherein the diffusion barrier layer further comprises a metal diffusion barrier layer.
3. The device of claim 2 , wherein the metal diffusion barrier layer formed of a material chosen from titanium nitride, tantalum silicon nitride, and titanium silicon nitride.
4. The device of claim 1 , further comprising a shield layer formed on the ferroelectric capacitor.
5. The device of claim 1 , further comprising a strontium ruthenium oxide layer stacked between the bottom electrode and the ferroelectric layer.
6. The device of claim 1 , further comprising a strontium ruthenium oxide layer stacked between the ferroelectric layer and the top electrode.
7. The device of claim 1 , further comprising an iridium oxide layer stacked between the bottom electrode and the ferroelectric layer.
8. The device of claim 1 , further comprising an iridium oxide layer stacked between the ferroelectric layer and the top electrode.
9. The device of claim 1 , wherein the plug material comprises tungsten.
10. The device of claim 1 , wherein the plug material comprises oxide.
11. The device of claim 1 , further comprising a second top electrode formed on the insulation layer and plug material.
12. The device of claim 1 , further comprising a plate line formed on the insulation layer and connected to the diffusion barrier layer and the plug material.
13. A method for manufacturing a semiconductor device, comprising:
forming a ferroelectric capacitor including a bottom electrode, a ferroelectric layer, and a top electrode on a semiconductor substrate;
forming an insulation layer on the ferroelectric capacitor;
removing the insulation layer to partially expose the top electrode of the ferroelectric capacitor, thereby forming a contact hole;
forming a diffusion barrier layer including a strontium ruthenium oxide layer and an iridium layer in the contact hole, wherein the strontium ruthenium oxide layer is formed on the exposed top electrode and the iridium layer is formed directly on the strontium ruthenium oxide layer; and
forming a plug material on the iridium to fill the contact hole.
14. The method of claim 13 , wherein the ferroelectric capacitor further comprises a strontium ruthenium oxide layer stacked between the bottom electrode and the ferroelectric layer.
15. The method of claim 13 , wherein the ferroelectric capacitor further comprises a strontium ruthenium oxide layer stacked between the ferroelectric layer and the top electrode.
16. The method of claim 13 , wherein the ferroelectric capacitor further comprises an iridium oxide layer stacked between the bottom electrode and the ferroelectric layer.
17. The method of claim 13 , wherein the ferroelectric capacitor further comprises an iridium oxide layer stacked between the ferroelectric layer and the top electrode.
18. The method of claim 13 , which further comprises forming a plate line on the insulation layer, the plate line being connected to the diffusion barrier layer and the plug material.
19. A ferroelectric random access memory (FeRAM) device comprising:
a first insulation layer formed on a semiconductor substrate;
a ferroelectric capacitor including a bottom electrode, a first strontium ruthenium oxide layer, a ferroelectric layer, a second strontium ruthenium oxide layer, and a top electrode, formed on the first insulation layer;
a shield layer formed on the ferroelectric capacitor and the first insulation layer;
a second insulation layer formed on the shield layer, the shield layer and the second insulation layer having a contact hole extending therethrough to expose a portion of the top electrode of the ferroelectric capacitor;
a diffusion barrier layer including a strontium ruthenium oxide layer and an iridium layer formed on the exposed portion of the top electrode and sidewalls of the contact hole;
a plug material formed on the iridium layer to fill the contact hole; and
a plate line formed on the insulation layer and connected to the diffusion barrier layer and the plug material.
20. The FeRAM device of claim 19 , further comprising plugs to connect the bottom electrode to a source/drain region formed in the semiconductor substrate.