Semiconductor device, method of manufacture thereof and semiconductor integrated circuit
An FTI structure is employed in an isolation region making contact in a Y direction with a P-type impurity region serving as a drain region of a PMOS transistor. First, second and third N-type impurity layers serving as body regions are connected to a high potential line via fourth, fifth and sixth N-type impurity layers, respectively, and further via a seventh N-type impurity layer. The fourth to sixth N-type impurity layers are provided between an insulating layer of an SOI substrate and an element isolation insulating film in a PTI region.
1. A semiconductor device comprising:
a plurality of MIS transistors located in a semiconductor layer provided on an insulating layer, said MIS transistors each including at least one gate electrode, a first semiconductor region of a first conductivity type, a second semiconductor region of a first conductivity type and a third semiconductor region of a second conductivity type which is opposite to a first conductivity type interposed between said first semiconductor region and said second semiconductor region, said first semiconductor and said second semiconductor regions being located on both sides of said gate electrode in a gate length direction and each reaching said insulating layer; and
a first-element isolation insulating film located in said semiconductor layer and reaching said insulating layer, wherein
said first element isolation insulating film abuts on said first semiconductor region and said second semiconductor region and isolates MIS transistors of the same conductivity type from one another;
said semiconductor device further comprising,
a second element isolation insulating film located in said semiconductor layer, and
a fourth semiconductor region of a second conductivity type being provided between said second element isolation insulating film and said insulating layer.
2. The semiconductor device according to claim 1 , wherein
said second element isolation insulating film abuts on said third semiconductor region.
3. The semiconductor device according to claim 2 , wherein
said gate electrode has a sidewall formed on both side surfaces thereof along an extending direction,
said first semiconductor region and said second semiconductor region include a semiconductor part in a position facing said sidewall, and
said second element isolation insulating film abutting on said third semiconductor region has a width along gate length direction, said width being set from the end of one said sidewall on the opposite side to said gate electrode to reach the end of the other said sidewall on the opposite side to said gate electrode via said gate electrode along said gate length direction.
4. The semiconductor device according to claim 2 , wherein
said second element isolation insulating film in a position abutting on said third semiconductor region has a width along said gate length direction, said width being extended by a minimum permissible width in a design rule from one end of said third semiconductor region toward said first semiconductor region and from the other end toward said second semiconductor region.
5. The semiconductor device according to claim 4 , wherein
said second element isolation insulating film has a width along said gate length direction, said width being widened beyond a minimum permissible distance in a design rule in an extending direction of said gate electrode from said first semiconductor region and said second semiconductor region.
6. A semiconductor integrated circuit comprising:
a Type I block forming a circuit that includes the semiconductor device recited in claim 1 ;
a Type II block forming another circuit; and
an isolation region isolating said blocks,
said semiconductor integrated circuit being formed in said semiconductor layer provided on said insulating layer,
wherein an isolation insulating film isolating blocks reaches said insulating layer at least in a position where interblock wiring for interconnecting said blocks is installed.
7. The semiconductor integrated circuit according to claim 6 , wherein
said isolation insulating film does not reach said insulating layer except said position where said interblock wiring is installed.
8. The semiconductor integrated circuit according to claim 6 , wherein
the whole of said isolation insulating film isolating said blocks reaches said insulating layer.
9. The semiconductor device according to claim 2 , further comprising:
a plurality of high potential lines applied with different high potentials; and
a plurality of low potential lines applied with different low potentials, said low potentials being lower than any of said different high potentials,
wherein said fourth semiconductor region connects said third semiconductor region to one of said high potential lines and said low potential lines in each of said plurality of MIS transistors.