Semiconductor device and manufacturing process therefor
An objective of this invention is to allow each process of contacting of a test probe and bonding to be reliably conducted within a given region. A semiconductor device 100 has a probing mark 111 forming region; a bonding pad 110 having a bonding region 113; and a check mark 120 separate from the bonding pad 110. In the configuration, the probing mark 111 forming region and the bonding region 113 can be identified on the basis of a planar shape of the check mark 120.
1. A semiconductor device, comprising:
a bonding pad comprising a bonding region and a test-probe-contacting region within said pad; and
an area identification mark separate from said bonding pad such that it indicates a border between said bonding region and said test-probe-contacting region,
wherein said area identification mark and said bonding pad are made of a same material.
2. The semiconductor device as claimed in claim 1 , wherein said border can be detected on the basis of the contour of a region occupied by said area identification mark.
3. The semiconductor device as claimed in claim 1 , wherein said area identification mark has a substantially rectangular planar shape; and
one side of said rectangle indicates said border.
4. The semiconductor device as claimed in claim 1 ,
wherein said area identification mark has a width that is the same as a width of one of said bonding region and said test-probe-contacting region.
5. The semiconductor device as claimed in claim 1 ,
comprising a plurality of said bonding pads,
wherein said one area identification mark indicates said border in each of said plurality of bonding pads.
6. The semiconductor device as claimed in claim 5 ,
comprising a row of said plurality of bonding pads aligned in line;
wherein at least one said area identification mark is provided for said one row, and said one area identification mark indicates said border of said bonding pad constituting said one row.
7. The semiconductor device as claimed in claim 6 ,
wherein said bonding regions and said test-probe-contacting regions are alternately disposed along an extension of said row; and
said one area identification marks indicates said border of said one bonding pad constituting said row and said border of another bonding pad adjacent to said one bonding pad.
8. The semiconductor device as claimed in claim 1 , wherein said bonding pad and said area identification mark are formed at a same level of the semiconductor device.
9. The semiconductor device as claimed in claim 1 , further comprising:
a semiconductor substrate, and
a protective layer made of an organic resin which is formed on said semiconductor substrate and has an opening in a predetermined region;
wherein a contour of said opening constitutes a contour of said area identification mark.
10. The semiconductor device as claimed in claim 9 , wherein said organic resin is a polyimide.
11. The semiconductor device as claimed in claim 9 , wherein said organic resin is poly-para-phenylenebenzoxazole.
12. A process for manufacturing a semiconductor device, comprising:
preparing said semiconductor device as claimed in claim 1 ;
detecting said border by means of said area identification mark and contacting a test probe with said test-probe-contacting region on the basis of said detected border;
bonding a conductor for external connection to said bonding region on the basis of said detected border after said contacting said test probe.
13. The semiconductor device as claimed in claim 1 , wherein said area identification mark has a straight edge indicating the border and wherein said bonding pad and said area identification mark have a same width measured in a direction parallel to said straight edge.
14. A semiconductor device, comprising:
a bonding pad comprising a bonding region and a test-probe-contacting region within said pad; and
an area identification mark separate from said bonding pad such that it indicates a border between said bonding region and said test-probe-contacting region, said area identification mark having a straight edge that is collinear with the border,
wherein said bonding pad and said area identification mark are made of a same material.