Semiconductor device and method for fabricating the same
A semiconductor device has a first insulating film formed on a substrate and having a first trenched portion, a second insulating film formed on the first insulating film, a third insulating film formed on the second insulating film and having a specific dielectric constant of 3 or less, and a first interconnection formed in the first trenched portion. The second insulating film is made of a compound containing silicon, oxygen, carbon, and nitrogen and the composition ratio of oxygen to silicon in the upper surface of the second insulating film is higher by 5% or more than in the bottom surface of the second insulating film.
1 . A semiconductor device comprising:
a first insulating film formed on a substrate and having a first trenched portion;
a second insulating film formed on the first insulating film;
a third insulating film formed on the second insulating film and having a specific dielectric constant of 3 or less; and
a first interconnection formed in the first trenched portion, wherein
the second insulating film is made of a compound containing silicon, oxygen, carbon, and nitrogen and
a composition ratio of oxygen to silicon is higher by 5% or more in an upper surface of the second insulating film than in a bottom surface of the second insulating film.
2 . The semiconductor device of claim 1 , further comprising:
a fourth insulating film formed between the first and second insulating films and made of a compound containing silicon, oxygen, carbon, and nitrogen, wherein
the second insulating film is made of a compound in which an atomic percent of oxygen is higher than an atomic percent of nitrogen and
the fourth insulating film is made of a compound in which the atomic percent of oxygen is lower than the atomic percent of nitrogen.
3 . The semiconductor device of claim 1 , wherein the third insulating film is made of carbon-containing silicon oxide (SiOC).
4 . The semiconductor device of claim 1 , further comprising:
a second interconnection made of a conductive material filled in a second trenched portion provided in the third insulating film.
5 . The semiconductor device of claim 4 , further comprising:
a plug formed to extend through at least the second and third insulating films and provide an electric connection between the first and second interconnections.
6 . The semiconductor device of claim 1 , further comprising:
a fifth insulating film formed on the third insulating film and protecting the third insulating film.
7 . A method for fabricating a semiconductor device, the method comprising the steps of:
(a) forming a first insulating film on a substrate, forming a first trenched portion in the first insulating film, and then filling a conductive material in the first trenched portion to form a first interconnection;
(b) forming, on the first insulating film, a second insulating film made of a compound containing silicon, oxygen, carbon, and nitrogen and covering the first interconnection;
(c) forming, in an upper surface of the second insulating film, a surface layer in which a composition ratio of oxygen to silicon is higher by 5% or more than in a bottom surface of the second insulating film; and
(d) forming, on the second insulating film, a third insulating film having a specific dielectric constant of 3 or less.
8 . The method of claim 7 , wherein the third insulating film is made of carbon-containing silicon oxide (SiOC).
9 . The method of claim 7 , wherein the step (c) is a step of exposing the upper surface of the second insulating film to a plasma of a helium gas or a gas mixture containing helium.
10 . The method of claim 9 , wherein the plasma is a plasma of a gas mixture containing at least one of oxygen and carbon dioxide.
11 . The method of claim 9 , wherein the step (c) is a step of continuously processing the second insulating film without exposing the second insulating film to an ambient atmosphere by using the same chamber as used to form the second insulating film in the step (b).
12 . The method of claim 7 , wherein the step (c) is a step of depositing, on the upper surface of the second insulating film, the surface layer in which the composition ratio of oxygen to silicon is higher by 5% or more than in the bottom surface of the second insulating film.
13 . The method of claim 7 , further comprising the step of:
(e) prior to the step (b), forming a fourth insulating film made of a compound containing silicon, oxygen, carbon, and nitrogen on the first insulating film, wherein
the second insulating film is made of a compound in which an atomic percent of oxygen is higher than an atomic percent of nitrogen and
the fourth insulating film is made of a compound in which the atomic percent of oxygen is lower than the atomic percent of nitrogen.
14 . The method of claim 13 , wherein the steps (e) and (b) are performed continuously in the same vacuum chamber.
15 . The method of claim 7 , further comprising the step of:
(f) after the step (d), forming a second trenched portion in an upper portion of the third insulating film and filling a conductive material in the second trenched portion to form a second interconnection.
16 . The method of claim 15 , wherein the step (f) includes the steps of:
forming a via hole at a position included in a region of the third insulating film formed with the second trenched portion to expose the first interconnection therethrough; and
filling a conductive material in the via hole to form a plug for providing an electric connection between the first and second interconnections.