IP Library Granted Patent US 7,388,660
Granted Patent B2
US 7,388,660 · App. 11/344,205 · Granted Jun 17, 2008

Light amount measurement device and light amount measurement method

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Quick Facts
Patent No.
US 7,388,660
App. No.
11/344,205
Granted
Jun 17, 2008
Kind
B2
Abstract

A device for measuring the intensity of incoming light is disclosed. This device includes a rotatable light blocking unit which interrupts incident signal light at short regular intervals. The device also includes a light source which emits certain light different from the signal light while the signal light is interrupted by the block unit, and a measurement unit for measuring intensity values of the signal light and the certain light. A correction unit is provided for correcting the measured signal light intensity based on the certain light intensity. A calculator unit calculates a correction value through comparison of the intensity of the certain light to a reference value. The correction unit uses this correction value to correct the signal light intensity.

Claims (28)

1. A light amount measurement device comprising:

a blocking unit responsive to receipt of incident signal light for rotating and interrupting the signal light at predefined time intervals;

a light source operative to emit certain light different from the signal light within a time period during which the signal light is interrupted by said blocking unit;

a measurement unit for receiving the signal light and the certain light and for measuring an intensity of the signal light and an intensity of the certain light;

a correction unit for correcting the intensity of said signal light based on the intensity of said certain light; and

a calculator unit for calculating a correction value through comparison of a reference value and the intensity of said certain light, wherein

said correction unit corrects the intensity of said signal light based on said correction value.

2. The device according to claim 1 , wherein said light source is driven and controlled to blink to thereby emit said certain light.

3. The device according to claim 2 , wherein said light source is driven and controlled with a prespecified amplitude for a predefined number of times to thereby emit said certain light.

4. The device according to claim 2 , wherein said light source is driven and controlled with a ramped amplitude for a predefined number of times to thereby emit said certain light.

5. The device according to claim 2 , wherein said light source is driven and controlled with a predefined period for a predefined number of times to thereby emit said certain light.

6. The device according to claim 1 , further comprising:

a rotation position detector for detection of a rotation position of said blocking unit.

7. The device according to claim 6 , further comprising:

a synchronizer circuit for generating based on a detection signal of said rotation position detector a modulation synchronization signal as synchronized with a modulation timing of said blocking unit, wherein

said light source is operable with the modulation synchronization signal as a trigger to emit said certain light.

8. The device according to claim 1 , wherein said correction unit corrects based on said correction value any one of an intensity of said signal light as measured by said measurement unit prior to interruption by said blocking unit and an intensity of said signal light measured by said measurement unit after interruption by said blocking unit.

9. A light amount measuring method comprising:

measuring an intensity of incident signal light with a predetermined period;

measuring, within a time period during which the signal light is absent, an intensity of certain light as emitted from a light source different from a light source of said signal light; and

correcting the intensity of said signal light based on the intensity of said certain light.

10. A light amount measurement method comprising:

interrupting incident signal light at prespecified time intervals;

receiving the signal light for measurement of an intensity of the signal light;

causing a light source different from that of said signal light to emit certain light within a time period during which said signal light is interrupted;

receiving said certain light for measurement of an intensity thereof;

calculating a correction value through comparison of the intensity of said certain light to a reference value; and

using the correction value to correct the intensity of said signal light.

Assignments (5)
MERGER AND CHANGE OF NAME Recorded Aug 19, 2021
From: TOSHIBA MEMORY CORPORATION; K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 057224/0091 →
CHANGE OF NAME Recorded Aug 19, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 057224/0641 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 3, 2018
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 045421/0052 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 21, 2012
From: KABUSHIKI KAISHA TOPCON
To: NUFLARE TECHNOLOGY, INC.
Reel/Frame 029000/0022 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 11, 2010
From: ADVANCED MASK INSPECTION TECHNOLOGY INC.
To: KABUSHIKI KAISHA TOSHIBA; NEC CORPORATION
Reel/Frame 025348/0666 →