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App. No. 11/352,012 · Confirmation No. 4356

Application of in-situ plasma measurements to performance and control of a plasma processing system

Inventor: Leonard J. Mahoney
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2008-04-30 ABN Abandonment 2 View
2007-10-19 CTNF Non-Final Rejection 6 View
2007-10-19 892 List of references cited by examiner 1 View
2007-10-19 SRFW Search information including classification, databases and other search related notes 1 View
2007-10-13 SRNT Examiner's search strategy and results 2 View
2006-10-23 PETDEC Petition Decision 2 View
2006-10-13 N578 Notification of Withdrawal of Attorney 1 View
2006-10-13 BIB Bibliographic Data Sheet 1 View
2006-08-04 C.AD Change of Address 1 View
2006-06-27 PET.OP Petition for review by the Office of Petitions 5 View
2006-04-18 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2006-04-18 OATH Oath or Declaration filed 3 View
2006-03-09 PEFN Pre-Exam Formalities Notice 2 View
2006-02-10 TRNA Transmittal of New Application 3 View
2006-02-10 SPEC Specification 20 View
2006-02-10 CLM Claims 2 View
2006-02-10 ABST Abstract 1 View
2006-02-10 DRW Drawings-only black and white line drawings 6 View
2006-02-10 WFEE Fee Worksheet (SB06) 1 View
2006-02-10 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/352,012
Filed
2006-02-10
Pub. No.
US20060180570A1
Examiner
ROMAN, ANGEL
Art Unit
2812