IP Library Patent Application 60653070
Patent Application Provisional
App. No. 60/653,070 · Confirmation No. 6539

Application of in-situ plasma measurements to performance and control of a plasma processing system

Provisional Application Expired
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Code Description Pages PDF
2006-08-04 C.AD Change of Address 1 View
2006-08-03 N578 Notification of Withdrawal of Attorney 2 View
2006-06-27 PA.. Power of Attorney 2 View
2006-06-27 LET. Miscellaneous Incoming Letter 3 View
2005-02-14 TRNA Transmittal of New Application 1 View
2005-02-14 SPEC Specification 12 View
2005-02-14 DRW Drawings-only black and white line drawings 5 View
2005-02-14 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/653,070
Filed
2005-02-14