Patent Assignment
Reel/Frame 017251/0365
Corrective Assignment to Correct the Recordal of the Security Agreement Previously Recorded on Reel 017089 Frame 0881.
Recorded: 2006-02-10
Pages: 16
Assignor
ADVANCED PLASMA, INC.
Executed: 2005-12-09
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Properties
(15)
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
PCT:
PCT/US2004/026127 ↗
Techniques for Packaging and Encapsulating Components of Diagnostic Plasma Measurement Devices
PCT:
PCT/US2005/009581 ↗
Diagnostic Plasma Measurement Device Having Patterned Sensors and Features
PCT:
PCT/US2005/020394 ↗
Electrically Floating Diagnostic Plasma Probe with Ion Property Sensors
PCT:
PCT/US2005/030691 ↗
Wafer Probe for Measuring Plasma and Surface Characteristics in Plasma Processing Enviroments
Vertical Mos Transistor
Patent:
6,777,288 →
Application:
10/290,138 →
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Techniques for packaging and encapsulating components of diagnostic plasma measurement devices
Application:
10/815,124 →
Publication:
US 2005/0217796
Diagnostic plasma measurement device having patterned sensors and features
Application:
10/875,954 →
Publication:
US 2005/0284570
Electrically floating diagnostic plasma probe with ion property sensors
Application:
10/933,167 →
Publication:
US 2006/0043063
Wafer probe for measuring plasma and surface characteristics in plasma processing enviroments
Application:
10/951,084 →
Publication:
US 2005/0039852
Wafer Probe for Measuring Plasma and Surface Characteristics in Plasma Processing Environments
Diagnostic plasma sensors for endpoint and end-of-life detection
Application:
11/047,256 →
Publication:
US 2006/0171848
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Application of in-situ plasma measurements to performance and control of a plasma processing system
Application:
60/653,070 →
Related Assignments
(11)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 14, 2003
From: MAHONEY, LEONARD J.; ALMGREN, CARL W.; ROCHE, GREGORY A.; SAYLOR, WILLIAM W.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 014400/0427 →
Assignment of Assignor's Interest
Mar 31, 2004
From: CARTER, DANIEL C.; DORAN, DANIEL B.; MAHONEY, LEONARD J.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 015178/0952 →
Assignment of Assignor's Interest
Jun 24, 2004
From: DORAN, DANIEL B.; MAHONEY, LEONARD J.; ROBERTS, STEVEN J.; ROCHE, GREGORY A.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 015520/0032 →
Assignment of Assignor's Interest
Jan 31, 2005
From: ROCHE, GREGORY A.; CARTER, DANIEL C.; MADSEN, DAVID W.; MAHONEY, LEONARD J.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 016238/0906 →
Assignment of Assignor's Interest
Jan 31, 2005
From: FROMMER, JANE E.; UNAL, KEREM; WICKRAMASINGHE, HEMANTHA K.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 016240/0503 →
Security Agreement
Jan 31, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ADVANCED PLASMA, INC.
Reel/Frame 017089/0881 →
Assignment of Assignor's Interest
Mar 27, 2006
From: AVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017366/0240 →
Assignment of Assignor's Interest
Mar 28, 2006
From: ADVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017374/0153 →
Assignment of Assignor's Interest
Dec 4, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018654/0653 →
Assignment of Assignor's Interest
Mar 6, 2007
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 019002/0096 →
Merger
Jan 28, 2008
From: ONWAFER TECHNOLOGIES INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 020417/0596 →