Patent Assignment
Reel/Frame 014400/0427
Assignment of Assignor's Interest
Recorded: 2003-08-14
Pages: 3
Assignors
MAHONEY, LEONARD J.
Executed: 2003-08-14
ALMGREN, CARL W.
Executed: 2003-08-14
ROCHE, GREGORY A.
Executed: 2003-08-14
SAYLOR, WILLIAM W.
Executed: 2003-08-14
SPROUL, WILLIAM D.
Executed: 2003-08-14
WALDE, HENDRIK V.
Executed: 2003-08-14
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Property
(1)
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Related Assignments
(5)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
Jan 31, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ADVANCED PLASMA, INC.
Reel/Frame 017089/0881 →
Corrective Assignment to Correct the Recordal of the Security Agreement Previously Recorded on Reel 017089 Frame 0881.
Feb 10, 2006
From: ADVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017251/0365 →
Assignment of Assignor's Interest
Mar 27, 2006
From: AVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017366/0240 →
Assignment of Assignor's Interest
Dec 4, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018654/0653 →
Merger
Jan 28, 2008
From: ONWAFER TECHNOLOGIES INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 020417/0596 →