Patent Assignment
Reel/Frame 017366/0240
Assignment of Assignor's Interest
Recorded: 2006-03-27
Pages: 12
Assignor
AVANCED PLASMA, INC.
Executed: 2006-03-01
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Properties
(11)
Wafer Probe for Measuring Plasma and Surface Characteristics in Plasma Processing Enviroments
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Techniques for packaging and encapsulating components of diagnostic plasma measurement devices
Application:
10/815,124 →
Publication:
US 2005/0217796
Diagnostic plasma measurement device having patterned sensors and features
Application:
10/875,954 →
Publication:
US 2005/0284570
Wafer probe for measuring plasma and surface characteristics in plasma processing environments
Application:
10/920,138 →
Publication:
US 2005/0011611
Electrically floating diagnostic plasma probe with ion property sensors
Application:
10/933,167 →
Publication:
US 2006/0043063
Wafer probe for measuring plasma and surface characteristics in plasma processing enviroments
Application:
10/951,084 →
Publication:
US 2005/0039852
Wafer Probe for Measuring Plasma and Surface Characteristics in Plasma Processing Environments
Diagnostic plasma sensors for endpoint and end-of-life detection
Application:
11/047,256 →
Publication:
US 2006/0171848
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Application of in-situ plasma measurements to performance and control of a plasma processing system
Application:
60/653,070 →
Related Assignments
(9)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 14, 2003
From: MAHONEY, LEONARD J.; ALMGREN, CARL W.; ROCHE, GREGORY A.; SAYLOR, WILLIAM W.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 014400/0427 →
Assignment of Assignor's Interest
Mar 31, 2004
From: CARTER, DANIEL C.; DORAN, DANIEL B.; MAHONEY, LEONARD J.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 015178/0952 →
Assignment of Assignor's Interest
Jan 31, 2005
From: FROMMER, JANE E.; UNAL, KEREM; WICKRAMASINGHE, HEMANTHA K.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 016240/0503 →
Assignment of Assignor's Interest
Jan 31, 2005
From: ROCHE, GREGORY A.; CARTER, DANIEL C.; MADSEN, DAVID W.; MAHONEY, LEONARD J.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 016238/0906 →
Security Agreement
Jan 31, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ADVANCED PLASMA, INC.
Reel/Frame 017089/0881 →
Corrective Assignment to Correct the Recordal of the Security Agreement Previously Recorded on Reel 017089 Frame 0881.
Feb 10, 2006
From: ADVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017251/0365 →
Assignment of Assignor's Interest
Dec 4, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018654/0653 →
Assignment of Assignor's Interest
Mar 6, 2007
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 019002/0096 →
Merger
Jan 28, 2008
From: ONWAFER TECHNOLOGIES INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 020417/0596 →