IP Library Patent Application 10920138
Patent Application Utility
App. No. 10/920,138 · Confirmation No. 7131

Wafer probe for measuring plasma and surface characteristics in plasma processing environments

Abandoned -- After Examiner's Answer or Board of Appeals Decision View Publication ↗
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2012-06-14 ABN Abandonment 2 View
2012-03-28 APDA Patent Board Decision - Examiner Affirmed 9 View
2010-05-05 AP_DK_M Appeal Docketing Notice 2 View
2010-04-28 RBNE Reply Brief Noted - Patent Board 2 View
2010-04-27 RBNE Reply Brief Noted - Patent Board 2 View
2010-02-26 APRB Reply Brief Filed 19 View
2010-02-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-02-23 M327 Miscellaneous Communication to Applicant - No Action Count 2 View
2009-12-29 APEA Examiner's Answer to Appeal Brief 15 View
2009-09-17 AP.B Appeal Brief Filed 20 View
2009-09-17 WFEE Fee Worksheet (SB06) 2 View
2009-09-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-09-17 XT/ Extension of Time 2 View
2009-07-22 AP.PRE.DEC Pre-Brief Appeal Conference decision 2 View
2009-04-27 AP.PRE.REQ Pre-Appeal Brief Conference Request 5 View
2009-04-27 WFEE Fee Worksheet (SB06) 2 View
2009-04-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-04-27 AP.PRE.REQ Pre-Appeal Brief Conference Request 1 View
2009-04-27 N/AP Notice of Appeal Filed 1 View
2009-04-07 CTAV Advisory Action (PTOL-303) 3 View
2009-04-07 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2009-03-26 A.NE Response After Final Action 1 View
2009-03-26 CLM Claims 2 View
2009-03-26 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2009-03-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-03-25 WFEE Fee Worksheet (SB06) 1 View
2009-01-27 CTFR Final Rejection 12 View
2009-01-27 892 List of references cited by examiner 1 View
2009-01-27 SRFW Search information including classification, databases and other search related notes 1 View
2009-01-27 FWCLM Index of Claims 1 View
2008-11-05 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-10-24 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-10-24 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-10-17 PA.. Power of Attorney 1 View
2008-10-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-10-17 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2008-10-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-10-13 CLM Claims 2 View
2008-10-13 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2008-10-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-10-13 WFEE Fee Worksheet (SB06) 1 View
2008-07-15 CTNF Non-Final Rejection 11 View
2008-07-15 SRFW Search information including classification, databases and other search related notes 1 View
2008-07-15 FWCLM Index of Claims 1 View
2008-05-06 RCEX Request for Continued Examination (RCE) 1 View
2008-05-06 WFEE Fee Worksheet (SB06) 2 View
2008-05-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-05-06 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2008-05-06 CLM Claims 2 View
2008-05-06 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2008-05-06 WFEE Fee Worksheet (SB06) 1 View
2008-04-21 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2008-04-21 CTAV Advisory Action (PTOL-303) 3 View
2008-04-04 A.NE Response After Final Action 1 View
2008-04-04 CLM Claims 2 View
2008-04-04 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2008-04-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-04-03 WFEE Fee Worksheet (SB06) 1 View
2008-02-06 CTFR Final Rejection 11 View
2008-02-06 892 List of references cited by examiner 1 View
2008-02-06 SRFW Search information including classification, databases and other search related notes 1 View
2008-02-06 FWCLM Index of Claims 1 View
2007-11-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-11-28 CLM Claims 2 View
2007-11-28 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2007-11-28 XT/ Extension of Time 1 View
2007-11-28 WFEE Fee Worksheet (SB06) 2 View
2007-11-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-11-28 WFEE Fee Worksheet (SB06) 1 View
2007-10-09 PA.. Power of Attorney 1 View
2007-10-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-06-28 CTNF Non-Final Rejection 7 View
2007-06-28 1449 List of References cited by applicant and considered by examiner 2 View
2007-06-28 892 List of references cited by examiner 1 View
2007-06-28 BIB Bibliographic Data Sheet 1 View
2007-06-28 FWCLM Index of Claims 1 View
2007-06-28 SRFW Search information including classification, databases and other search related notes 1 View
2007-06-22 SRNT Examiner's search strategy and results 13 View
2007-04-30 ELC. Response to Election / Restriction Filed 1 View
2007-04-30 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2007-04-04 CTRS Requirement for Restriction/Election 4 View
2007-02-12 ELC. Response to Election / Restriction Filed 1 View
2007-02-12 CLM Claims 4 View
2007-02-12 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2007-02-12 XT/ Extension of Time 1 View
2007-02-12 WFEE Fee Worksheet (SB06) 1 View
2006-12-14 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2006-12-07 CTRS Requirement for Restriction/Election 5 View
2006-12-04 PA.. Power of Attorney 8 View
2006-10-18 PETDEC Petition Decision 1 View
2006-09-21 C.AD Change of Address 2 View
2006-06-27 PET.OP Petition for review by the Office of Petitions 5 View
2004-08-17 TRNA Transmittal of New Application 2 View
2004-08-17 SPEC Specification 28 View
2004-08-17 CLM Claims 3 View
2004-08-17 ABST Abstract 1 View
2004-08-17 DRW Drawings-only black and white line drawings 15 View
2004-08-17 OATH Oath or Declaration filed 2 View
2004-08-17 WFEE Fee Worksheet (SB06) 1 View
2004-08-17 WFEE Fee Worksheet (SB06) 1 View
2004-08-17 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-08-17 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
10/920,138
Filed
2004-08-17
Pub. No.
US20050011611A1
Art Unit
1716