Patent Assignment
Reel/Frame 018654/0653
Assignment of Assignor's Interest
Recorded: 2006-12-04
Pages: 5
Assignor
ADVANCED ENERGY INDUSTRIES, INC.
Executed: 2006-06-09
Assignee
ONWAFER TECHNOLOGIES, INC.
5627 GIBRALTAR DRIVE, STE 200, PLEASANTON, CALIFORNIA, 94588
Covered Properties
(8)
Fragrance Emitting Device
Wafer Probe for Measuring Plasma and Surface Characteristics in Plasma Processing Enviroments
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Diagnostic plasma measurement device having patterned sensors and features
Application:
10/875,954 →
Publication:
US 2005/0284570
Wafer probe for measuring plasma and surface characteristics in plasma processing environments
Application:
10/920,138 →
Publication:
US 2005/0011611
Electrically floating diagnostic plasma probe with ion property sensors
Application:
10/933,167 →
Publication:
US 2006/0043063
Wafer Probe for Measuring Plasma and Surface Characteristics in Plasma Processing Environments
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Related Assignments
(7)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 14, 2003
From: MAHONEY, LEONARD J.; ALMGREN, CARL W.; ROCHE, GREGORY A.; SAYLOR, WILLIAM W.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 014400/0427 →
Assignment of Assignor's Interest
Jun 24, 2004
From: DORAN, DANIEL B.; MAHONEY, LEONARD J.; ROBERTS, STEVEN J.; ROCHE, GREGORY A.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 015520/0032 →
Assignment of Assignor's Interest
Aug 17, 2004
From: MAHONEY, LEONARD J.; CARTER, DANIEL C.; ROBERTS, STEVEN J.; ROCHE, GREGORY A.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 015728/0423 →
Security Agreement
Jan 31, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ADVANCED PLASMA, INC.
Reel/Frame 017089/0881 →
Corrective Assignment to Correct the Recordal of the Security Agreement Previously Recorded on Reel 017089 Frame 0881.
Feb 10, 2006
From: ADVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017251/0365 →
Assignment of Assignor's Interest
Mar 27, 2006
From: AVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017366/0240 →
Merger
Jan 28, 2008
From: ONWAFER TECHNOLOGIES INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 020417/0596 →