Patent Assignment
Reel/Frame 015728/0423
Assignment of Assignor's Interest
Recorded: 2004-08-17
Pages: 3
Assignors
MAHONEY, LEONARD J.
Executed: 2004-08-17
CARTER, DANIEL C.
Executed: 2004-08-17
ROBERTS, STEVEN J.
Executed: 2004-08-17
ROCHE, GREGORY A.
Executed: 2004-08-17
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Property
(1)
Wafer probe for measuring plasma and surface characteristics in plasma processing environments
Application:
10/920,138 →
Publication:
US 2005/0011611
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 27, 2006
From: AVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017366/0240 →
Assignment of Assignor's Interest
Dec 4, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018654/0653 →
Merger
Jan 28, 2008
From: ONWAFER TECHNOLOGIES INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 020417/0596 →