Patent Assignment
Reel/Frame 020417/0596
Merger
Recorded: 2008-01-28
Pages: 7
Assignor
ONWAFER TECHNOLOGIES INC.
Executed: 2007-01-16
Assignee
KLA-TENCOR CORPORATION
160 RIO ROBLES, SAN JOSE, CALIFORNIA, 95134
Covered Properties
(28)
Programmable Semiconductor Wafer for Sensing, Recording and Retrieving Fabrication Process Conditions to Which the Wafer Is Exposed
Patent:
5,444,637 →
Application:
08/127,941 →
Data Collection Methods and Apparatus
Data Collection Methods and Apparatus with Parasitic Correction
Methods and Apparatus for Low Power Delay Control
Sensor Geometry Correction Methods and Apparatus
Data Collection and Correction Methods and Apparatus
Methods and Apparatus for Power Control
Wafer Probe for Measuring Plasma and Surface Characteristics in Plasma Processing Enviroments
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Methods and Apparatus for Deriving Thermal Flux Data for Processing a Workpiece
Methods and Apparatus for Equipment Matching and Characterization
Methods of and Apparatus for Controlling Process Profiles
Process Tolerant Methods and Apparatus for Obtaining Data
Sensor methods and apparatus
Application:
10/848,523 →
Publication:
US 2005/0028049
Diagnostic plasma measurement device having patterned sensors and features
Application:
10/875,954 →
Publication:
US 2005/0284570
Maintenance Unit for a Sensor Apparatus
Wafer probe for measuring plasma and surface characteristics in plasma processing environments
Application:
10/920,138 →
Publication:
US 2005/0011611
Electrically floating diagnostic plasma probe with ion property sensors
Application:
10/933,167 →
Publication:
US 2006/0043063
Wafer Probe for Measuring Plasma and Surface Characteristics in Plasma Processing Environments
Diagnostic plasma sensors for endpoint and end-of-life detection
Application:
11/047,256 →
Publication:
US 2006/0171848
Sensor Array for Measuring Plasma Characteristics in Plasma Processing Environments
Methods and Apparatus for Low Distortion Parameter Measurements
Methods of and Apparatuses for Maintenance, Diagnosis, and Optimization of Processes
Methods of and Apparatuses for Controlling Process Profiles
Methods of and Apparatuses for Measuring Electrical Parameters of a Plasma Process
Sensor Apparatus Power Transfer, Communication and Maintenance Methods and Apparatus
Apparatus for Measurement of Parameters in Process Equipment
Apparatuses for and Methods of Monitoring Optical Radiation Parameters for Substrate Processing Operations
Related Assignments
(17)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 14, 2003
From: MAHONEY, LEONARD J.; ALMGREN, CARL W.; ROCHE, GREGORY A.; SAYLOR, WILLIAM W.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 014400/0427 →
Assignment of Assignor's Interest
Jun 24, 2004
From: DORAN, DANIEL B.; MAHONEY, LEONARD J.; ROBERTS, STEVEN J.; ROCHE, GREGORY A.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 015520/0032 →
Assignment of Assignor's Interest
Aug 17, 2004
From: MAHONEY, LEONARD J.; CARTER, DANIEL C.; ROBERTS, STEVEN J.; ROCHE, GREGORY A.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 015728/0423 →
Assignment of Assignor's Interest
Apr 8, 2005
From: ADVANCED MICRO DEVICES, INC.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 016038/0598 →
Security Agreement
Jan 31, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ADVANCED PLASMA, INC.
Reel/Frame 017089/0881 →
Corrective Assignment to Correct the Recordal of the Security Agreement Previously Recorded on Reel 017089 Frame 0881.
Feb 10, 2006
From: ADVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017251/0365 →
Assignment of Assignor's Interest
Mar 27, 2006
From: AVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017366/0240 →
Assignment of Assignor's Interest
Sep 21, 2006
From: POOLLA, KAMESHWAR; MUNDT, RANDALL S.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018764/0158 →
Assignment of Assignor's Interest
Sep 21, 2006
From: MUNDT, RANDALL S.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018763/0452 →
Assignment of Assignor's Interest
Sep 21, 2006
From: POOLLA, KAMESHWAR; SPANOS, COSTAS J.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018769/0774 →
Assignment of Assignor's Interest
Nov 13, 2006
From: FREED, MASON L.; MUNDT, RANDALL S.; SPANOS, COSTAS J.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018542/0019 →
Assignment of Assignor's Interest
Nov 13, 2006
From: POOLLA, KAMESHWAR; SPANOS, COSTAS J.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018571/0079 →
Assignment of Assignor's Interest
Dec 4, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018654/0653 →
Assignment of Assignor's Interest
Dec 29, 2006
From: POOLLA, KAMESHWAR
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018744/0006 →
Assignment of Assignor's Interest
Jan 29, 2007
From: ONWAFER TECHNOLOGIES, INC.
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 018816/0726 →
Affirmation of Patent Assignment
Aug 18, 2009
From: ADVANCED MICRO DEVICES, INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 023119/0083 →
Release of Security Interest
May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →