Patent Assignment
Reel/Frame 018816/0726
Assignment of Assignor's Interest
Recorded: 2007-01-29
Pages: 4
Assignor
ONWAFER TECHNOLOGIES, INC.
Executed: 2007-01-16
Assignee
REGENTS OF THE UNIVERSITY OF CALIFORNIA
111 FRANKLIN STREET, 12TH FLOOR, OAKLAND, CALIFORNIA, 94607-5200
Covered Properties
(8)
Methods and Apparatus for Low Distortion Parameter Measurements
PCT:
PCT/US2005/024505 ↗
Methods and Apparatus for Obtaining Data for Process Operation, Optimization, Monitoring, and Control
Patent:
6,691,068 →
Application:
09/643,614 →
Data Collection and Correction Methods and Apparatus
Methods and Apparatus for Deriving Thermal Flux Data for Processing a Workpiece
Methods of and Apparatus for Controlling Process Profiles
Sensor methods and apparatus
Application:
10/848,523 →
Publication:
US 2005/0028049
Methods and Apparatus for Low Distortion Parameter Measurements
Methods of and Apparatuses for Controlling Process Profiles
Related Assignments
(6)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 21, 2006
From: POOLLA, KAMESHWAR; MUNDT, RANDALL S.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018764/0158 →
Assignment of Assignor's Interest
Sep 21, 2006
From: POOLLA, KAMESHWAR; SPANOS, COSTAS J.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018769/0774 →
Assignment of Assignor's Interest
Nov 13, 2006
From: POOLLA, KAMESHWAR; SPANOS, COSTAS J.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018571/0079 →
Assignment of Assignor's Interest
Nov 13, 2006
From: POOLLA, KAMESHWAR; SPANOS, COSTAS J.
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018574/0437 →
Assignment of Assignor's Interest
Jan 8, 2007
From: HUNT, DEAN; SPANOS, COSTAS J.; WELCH, MICHAEL; POOLLA, KAMESHWAR
To: ONWAFER TECHNOLOGIES, INC.
Reel/Frame 018764/0061 →
Merger
Jan 28, 2008
From: ONWAFER TECHNOLOGIES INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 020417/0596 →