IP Library › Granted Patent US 6,830,650
Granted Patent Utility
US 6,830,650 · Confirmation No. 9215

WAFER PROBE FOR MEASURING PLASMA AND SURFACE CHARACTERISTICS IN PLASMA PROCESSING ENVIROMENTS

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2007-10-15 PA.. Power of Attorney 1 View
2006-12-15 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2006-12-04 PA.. Power of Attorney 8 View
2006-08-04 C.AD Change of Address 1 View
2004-10-07 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-10-07 1449 List of References cited by applicant and considered by examiner 1 View
2004-10-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-10-07 FWCLM Index of Claims 1 View
2004-09-30 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-08-12 RUSH Printer Query form, used by the publications branch 3 View
2004-08-12 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-08-12 1449 List of References cited by applicant and considered by examiner 2 View
2004-07-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-19 1449 List of References cited by applicant and considered by examiner 1 View
2004-07-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-19 FWCLM Index of Claims 1 View
2004-07-19 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-19 CLM Claims 3 View
2004-07-12 SRNT Examiner's search strategy and results 1 View
2004-06-09 RCEX Request for Continued Examination (RCE) 3 View
2004-06-09 CLM Claims 3 View
2004-06-09 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-06-09 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-05-20 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-04-01 CTFR Final Rejection 7 View
2004-04-01 FWCLM Index of Claims 1 View
2004-04-01 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-02-24 SPEC Specification 9 View
2004-02-24 CLM Claims 4 View
2004-02-24 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-11-25 CTNF Non-Final Rejection 7 View
2003-11-25 1449 List of References cited by applicant and considered by examiner 1 View
2003-11-25 892 List of references cited by examiner 1 View
2003-11-25 FWCLM Index of Claims 1 View
2003-11-25 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-24 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-11-19 SRNT Examiner's search strategy and results 4 View
2003-06-30 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-06-30 FOR Foreign Reference 39 View
2002-07-12 TRNA Transmittal of New Application 2 View
2002-07-12 SPEC Specification 21 View
2002-07-12 CLM Claims 2 View
2002-07-12 ABST Abstract 1 View
2002-07-12 DRW Drawings-only black and white line drawings 12 View
2002-07-12 OATH Oath or Declaration filed 3 View
2002-07-12 WFEE Fee Worksheet (SB06) 1 View
2002-07-12 WFEE Fee Worksheet (SB06) 1 View
2002-07-12 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,830,650
App. No.
10/194,526
Filed
2002-07-12
Granted
2004-12-14
Pub. No.
US20040007326A1
Art Unit
1763
PTA
0 days