Patent Assignment
Reel/Frame 019002/0096
Assignment of Assignor's Interest
Recorded: 2007-03-06
Pages: 4
Assignor
ADVANCED ENERGY INDUSTRIES, INC.
Executed: 2006-06-09
Assignee
ONWAFER TECHNOLOGIES, INC.
5627 GIBRALTAR DRIVE, STE 200, PLEASANTON, CALIFORNIA, 94588
Covered Property
(1)
Diagnostic plasma sensors for endpoint and end-of-life detection
Application:
11/047,256 →
Publication:
US 2006/0171848
Related Assignments
(6)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 31, 2005
From: ROCHE, GREGORY A.; CARTER, DANIEL C.; MADSEN, DAVID W.; MAHONEY, LEONARD J.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 016238/0906 →
Assignment of Assignor's Interest
Jan 31, 2005
From: FROMMER, JANE E.; UNAL, KEREM; WICKRAMASINGHE, HEMANTHA K.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 016240/0503 →
Security Agreement
Jan 31, 2006
From: ADVANCED ENERGY INDUSTRIES, INC.
To: ADVANCED PLASMA, INC.
Reel/Frame 017089/0881 →
Corrective Assignment to Correct the Recordal of the Security Agreement Previously Recorded on Reel 017089 Frame 0881.
Feb 10, 2006
From: ADVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017251/0365 →
Assignment of Assignor's Interest
Mar 27, 2006
From: AVANCED PLASMA, INC.
To: ADVANCED ENERGY INDUSTRIES, INC.
Reel/Frame 017366/0240 →
Merger
Jan 28, 2008
From: ONWAFER TECHNOLOGIES INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 020417/0596 →