Semiconductor device featuring overlay-mark used in photolithography process
View Patent ↗In a semiconductor device, an insulating layer formed on a substrate and a wiring pattern layer is formed on the insulating layer. A lower mark element is defined as a groove formed in the insulating layer, and defines an overlay mark in conjunction with an upper mask element formed in a photoresist pattern coated on the insulating layer for the formation of the wiring pattern layer. The lower mark element features a width falling within a range from approximately 4 to 6 μm, and a depth of at most 1 μm.
1. A semiconductor device comprising:
an insulating layer formed on a substrate;
a wiring pattern layer formed on said insulating layer; and
a lower mark element defined as a groove formed in said insulating layer, said lower mark element defining an overlay mark in conjunction with an upper mask element formed in a photoresist pattern coated on said insulating layer for the formation of said wiring pattern layer,
wherein said lower mark element features a width falling within a range from approximately 4 to 6 μm, and a depth of at most 1 μm.
2. The semiconductor device as set forth in claim 1 , wherein said groove has a polygonal frame configuration when viewed from a location above a top surface of said insulating layer.
3. The semiconductor device as set forth in claim 2 , wherein said polygonal frame configuration is defined as a square frame configuration.
4. The semiconductor device as set forth in claim 1 , wherein said groove has an incomplete square frame configuration when viewed from a location above a top surface of said insulating layer.
5. The semiconductor device as set forth in claim 1 , wherein said groove has a circular frame configuration when viewed from a location above a top surface of said insulating layer.
6. The semiconductor device as set forth in claim 1 , wherein said groove has an incomplete circular frame configuration when viewed from a location above a top surface of said insulating layer.
7. The semiconductor device as set forth in claim 1 , further comprising a metal layer formed on inner wall faces of said groove so that the width of said groove are narrowed due to a thickness of said metal layer, the narrowed groove falling within a range from approximately 3 to 5 μm.
8. The semiconductor device as set forth in claim 7 , wherein said metal layer is composed of one selected from a group consisting of tungsten (W), tungsten (W) alloy, copper (Cu), copper (Cu) alloy, tantalum (Ta), tantalum (Ta) alloy and phosphorus-doped polycrystalline silicon.
9. The semiconductor device as set forth in claim 7 , wherein said metal layer is defined as a first metal layer, said semiconductor device further comprising a second metal layer formed on a top surface of said insulating layer so that said narrowed groove is traversed with said second metal layer.
10. The semiconductor device as set forth in claim 9 , wherein said second metal layer is composed of one selected from a group consisting of aluminum (Al), copper (Cu) and titanium (Ti).
11. A semiconductor device comprising:
an insulating layer formed on a substrate;
a lower mark element defined as a groove formed in said insulating layer;
a metal layer formed on said insulating layer;
a photoresist pattern formed on said metal layer; and
an upper mark element defined as an opening formed in said photoresist pattern, both said lower mark element and said upper mark element defining an overlay mark in conjunction with each other,
wherein said lower mark element features a width falling within a range from approximately 4 to 6 μm, and a depth of at most 1 μm.
12. The semiconductor device as set forth in claim 11 , wherein said groove has a polygonal frame configuration when viewed from a location above a top surface of said insulating layer.
13. The semiconductor device as set forth in claim 12 , wherein said polygonal frame configuration is defined as a square frame configuration.
14. The semiconductor device as set forth in claim 11 , wherein said groove has an incomplete square frame configuration when viewed from a location above a top surface of said insulating layer.
15. The semiconductor device as set forth in claim 11 , wherein said groove has a circular frame configuration when viewed from a location above a top surface of said insulating layer.
16. The semiconductor device as set forth in claim 11 , wherein said groove has an incomplete circular frame configuration when viewed from a location above a top surface of said insulating layer.
17. The semiconductor device as set forth in claim 11 , wherein said groove is traversed with said metal layer so that the width of said groove are narrowed due to a thickness of said metal layer, the narrowed groove falling within a range from approximately 3 to 5 μm.
18. The semiconductor device as set forth in claim 17 , wherein said metal layer is composed of one selected from a group consisting of tungsten (W), tungsten (W) alloy, copper (Cu), copper (Cu) alloy, tantalum (Ta), tantalum (Ta) alloy and phosphorus-doped polycrystalline silicon.
19. The semiconductor device as set forth in claim 17 , wherein said metal layer is defined as a first metal layer, said semiconductor device further comprising a second metal layer formed on a top surface of said insulating layer so that said narrowed groove is traversed with said second metal layer.
20. The semiconductor device as set forth in claim 19 , wherein said second metal layer is composed of one selected from a group consisting of aluminum (Al), copper (Cu) and titanium (Ti).