Photo mask and method of manufacturing the same, and method of forming photosensitive film pattern of using the photo mask
The present invention relates to a photo mask and a method of manufacturing the same, and a method of forming a photosensitive film pattern using the photo mask. A photo mask pattern having an exposure region, a phase-inverse region and a photosensitive region is provided. The predetermined size and shape of the patterns on the photo mask are formed. Through this manner, distortions of the photosensitive film pattern upon development are compensated and a target photosensitive film pattern can be more accurately acquired. Furthermore, the depth of focus of a photolithography process can be increased.
1. A method of forming a photosensitive film pattern, comprising the steps of:
covering a photosensitive film on a base layer and then performing a baking process;
performing the exposure process using a photo mask having an exposure region of an isolated pattern shape, comprising: a light-shielding film formed at the entire short side peripheral region and at the region of below about 90% of a long side peripheral region in the exposure region, and a phase-reverse film formed at the entire long side peripheral region except for the predetermined portions where the light-shielding film is formed, wherein a width of the light-shielding film is same as that of the phase reverse film; and
performing a development process to remove a portion of the photosensitive film.
2. The method as claimed in claim 1 , wherein the photosensitive film is formed using at least one of chemical amplified resist, dissolution inhibited resist and chain scission resist.
3. The method as claimed in claim 1 , wherein the baking process is performed using at least one of a hot plate mode, an over mode and a vacuum over mode.