Semiconductor device and method of manufacturing the same
View Patent ↗A semiconductor device of the present invention includes a chip which has a pad; a bump electrode formed on the pad; and a wire whose stitch bonding is made on the bump electrode. The wire satisfies a condition: (modulus-of-elasticity/breaking strength per unit area) ≧400.
1. A manufacturing method of a semiconductor device, comprising the steps of:
forming a bump electrode over a pad with a wire passed to a capillary;
operating the capillary in a horizontal direction with an amplitude at least more than a clearance between the wire and an inner wall of the capillary after the step of forming the bump electrode; and
cutting the wire by pulling upward, holding both sides of the wire by a clamper after the step of operating the capillary in a horizontal direction;
wherein the wire satisfies a condition: (modulus-of-elasticity/breaking strength per unit area) ≧400.
2. The manufacturing method of a semiconductor device according to claim 1 , wherein
the pad is provided on a chip, and
the wire is cut by pulling upward above the chip in the cutting step.
3. A manufacturing method of a semiconductor device, comprising the steps of:
performing stitch bonding of a wire over a bump electrode using a capillary;
operating the capillary in a horizontal direction with an amplitude at least more than a clearance between the wire and an inner wall of the capillary after the step of performing stitch bonding; and
cutting the wire by pulling upward, holding both sides of the wire by a clamper after the step of operating the capillary in a horizontal direction;
wherein the wire satisfies a condition: (modulus-of-elasticity/breaking strength per unit area) ≧400.
4. The manufacturing method of a semiconductor device according to claim 3 , further comprising the steps of:
forming the bump electrode on a pad provided on a chip;
bonding the wire onto a connecting point outside the chip after the step of forming the bump electrode;
moving the capillary passing the wire therein toward the bump electrode before the step of performing the stitch bonding and after the step of bonding the wire.