Silicon on sapphire wafer
View Patent ↗The present invention provides an SOS wafer comprising a non-transparent polysilicon layer provided on a back surface of a sapphire substrate, a silicon nitride layer which protects the polysilicon layer, and a stress relaxing film which cancels stress produced in the silicon nitride layer, wherein the silicon nitride layer and the stress relaxing film are provided on the back surface side.
1. A silicon on sapphire wafer, comprising:
a sapphire substrate;
a polysilicon layer which is provided on a back surface of the sapphire substrate and which is non-transparent;
a stress relaxing film which is provided on the polysilicon layer, which consists of a silicon nitride film having Si—H bonds and having a Si—H concentration of 10×10 21 /cm 3 or less determined from an infrared absorption peak, and which is in a state of compressive stress due to the Si—H concentration; and
a silicon nitride layer which is provided on the stress relaxing film and which is in a state of tensile stress
wherein the tensile stress of the silicon nitride layer is set so as to be cancelled by the compressive stress of the silicon nitride film so that warping of the silicon on sapphire wafer is reduced or prevented.
2. The silicon on sapphire wafer according to claim 1 , wherein the stress relaxing film is formed by a plasma CVD method.
3. The silicon on sapphire wafer according to claim 2 , wherein the silicon nitride film has a low wavenumber-end wavenumber of a Si—H infrared absorption peak which is greater than or equal to 1960/cm.
4. The SOS wafer according to claim 1 , wherein the stress relaxing film is disposed over the silicon nitride layer.
5. The SOS wafer according to claim 4 , wherein when the silicon nitride layer is in a tensile stress state, the stress relaxing film is used as silicon nitride film formed by a plasma CVD method.
6. The SOS wafer according to claim 5 , wherein an Si—H concentration determined from an infrared absorption peak of the silicon nitride film is less than or equal to 10×10 21 /cm 3 , and a low wavenumber-end wavenumber of an Si—H absorption peak at infrared absorption of the silicon nitride film is greater than or equal to 1960/cm.
7. A silicon on sapphire wafer, comprising:
a sapphire substrate;
polysilicon layer which is provided on a back surface of the sapphire substrate and which is non-transparent;
a stress relaxing film which is provided on the polysilicon layer, which consists of a silicon nitride film having Si—H bonds and having a Si—H concentration of 10×10 21 /cm 3 or less determined from an infrared absorption peak, and which is in a state of compressive stress due to the Si—H concentration; and
a silicon nitride layer which is provided on the stress relaxing film, which is in a state of tensile stress, and which protects the polysilicon layer,
wherein the tensile stress of the silicon nitride layer is set so as to be cancelled by the compressive stress of the silicon nitride film so that warping of the silicon on sapphire wafer is reduced or prevented, and
wherein the stress relaxing film is formed by a plasma CVD method.
8. The silicon on sapphire wafer according to claim 7 , wherein the silicon nitride film has a low wavenumber-end wavenumber of a Si—H infrared absorption peak which is greater than or equal to 1960/cm.