Metal-insulator-metal capacitor
A metal-insulator-metal (MIM) capacitor having a top electrode, a bottom electrode and a capacitor dielectric layer is provided. The top electrode is located over the bottom electrode and the capacitor dielectric layer is disposed between the top and the bottom electrode. The capacitor dielectric layer comprises several titanium oxide (TiO 2 ) layers and at least one tetragonal structure material layer. The tetragonal structure material layer is disposed between two titanium oxide layers and each tetragonal structure material layer has the same or a different thickness. Leakage path can be cut off through the tetragonal material layer between the titanium oxide layers. In the meantime, the tetragonal structure material layer can induce the titanium oxide layers to transform into a high k rutile phase.
1. A metal-insulator-metal (MIM) capacitor, comprising:
a bottom electrode;
a top electrode disposed over the bottom electrode; and
a capacitor dielectric layer disposed between the top electrode and the bottom electrode, wherein the capacitor dielectric layer comprises:
a plurality of titanium oxide (TiO 2 ) layers; and
at least one tetragonal structure material layer disposed between the titanium oxide layers, wherein each tetragonal structure material layer has the same thickness, wherein the material constituting the tetragonal structure material layers includes lead oxide (PbO 2 ), tin oxide (SnO 2 ), barium oxide (BaO 2 ) or strontium oxide (SrO 2 ), wherein
one of the plurality of TiO 2 layers is directly contacted with the top electrode, and another of the plurality of TiO 2 layers is directly contacted with the bottom electrode.
2. The MIM capacitor of claim 1 , wherein the material of the tetragonal structure material layer comprising a material having a band gap greater than titanium oxide.
3. The MIM capacitor of claim 1 , wherein each tetragonal structure material layer has a thickness between about 0.5 angstrom (Å) to 200 angstrom(Å).
4. The MIM capacitor of claim 1 , wherein the number of the tetragonal structure material layers in the capacitor dielectric layer is from 1 to 300.
5. A metal-insulator-metal (MIM) capacitor, comprising:
a bottom electrode;
a top electrode disposed over the bottom electrode; and
a capacitor dielectric layer disposed between the top electrode and the bottom electrode, wherein the capacitor dielectric layer comprises:
a plurality of titanium oxide (TiO 2 ) layers; and
at least one tetragonal structure material layer disposed between the titanium oxide layers, wherein the material constituting the tetragonal structure material layers includes lead oxide (PbO 2 ), tin oxide (SnO 2 ), barium oxide (BaO 2 ) or strontium oxide (SrO 2 ), wherein
one of the plurality of TiO 2 layers is directly contacted with the top electrode, and another of the plurality of TiO 2 layers is directly contacted with the bottom electrode.