Apparatus for the formation of a metal film
An apparatus for forming a metal film, including a reaction vessel in which a substrate to be treated is placed, a raw material gas feed pipe inserted into the inlet vessel for feeding chlorine or hydrogen chloride, a spiral tube attached to the inner end of the raw material gas feed pipe, having a raw material gas flow passage whose inner surface is made of copper, and equipped with a heating element, an atomic reducing gas producing device for producing an atomic reducing gas within the reaction vessel, at least in the neighborhood of the substrate to be treated, and an evacuation device for evacuating any gas from the reaction vessel and the raw material gas flow passage.
1 . An apparatus for forming a metal film, the apparatus comprising:
a reaction vessel in which a substrate to be treated is placed;
a raw material gas feed pipe inserted into said inlet vessel for feeding chlorine or hydrogen chloride;
a spiral tube attached to the inner end of said raw material gas feed pipe, having a raw material gas flow passage whose inner surface is made of copper, and equipped with a heating element;
atomic reducing gas producing means for producing an atomic reducing gas within said reaction vessel, at least in the neighborhood of said substrate to be treated; and
evacuation means for evacuating any gas from said reaction vessel and said raw material gas flow passage.
2 . An apparatus for forming a metal film as claimed in claim 1 wherein said spiral tube equipped with a heating element has a dual tubular structure consisting of an outer tube and an inner copper tube inserted into said outer tube and used as a flow passage for the raw material gas, and a heating medium is made to flow through the space between said outer tube and said inner copper tube.
3 . An apparatus for forming a metal film as claimed in claim 1 wherein said spiral tube equipped with a heating element has a structure consisting of a copper tube and a tubular heater disposed around said copper tube with a tubular insulator interposed therebetween.