Patent Assignment
Reel/Frame 019218/0371
Assignment of Assignor's Interest
Recorded: 2007-04-26
Pages: 7
Assignor
MITSUBISHI HEAVY INDUSTRIES, LTD.
Executed: 2007-04-11
Assignee
PHYZCHEMIX CORPORATION
ATT EAST 11F, 17-22, AKASAKA 2-CHOME, MINATO-KU, TOKYO, 107-0052, JAPAN
Covered Properties
(14)
Method and Apparatus for Production of Metal Film or the Like
Methods and apparatus for the formation of a metal film
Application:
10/684,503 →
Publication:
US 2004/0091636
Method and apparatus for production of metal film or the like
Application:
11/132,222 →
Publication:
US 2005/0217579
Interconnection Structure
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
Application:
11/252,811 →
Publication:
US 2006/0054593
Metal film production apparatus and metal film production method
Application:
11/260,153 →
Publication:
US 2006/0049136
Metal Film Production Apparatus
Metal film vapor phase deposition method and vapor phase deposition apparatus
Application:
11/336,898 →
Publication:
US 2006/0118046
Apparatus for the formation of a metal film
Application:
11/391,241 →
Publication:
US 2006/0191481
Method for the formation of a metal film
Application:
11/391,242 →
Publication:
US 2006/0177583
Apparatus for the formation of a metal film
Application:
11/391,251 →
Publication:
US 2006/0191477
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
Application:
11/638,510 →
Publication:
US 2007/0141274
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
Application:
11/638,511 →
Publication:
US 2007/0087577
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
Application:
11/638,522 →
Publication:
US 2007/0117363
Related Assignments
(4)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jul 7, 2003
From: SAKAMOTO, HITOSHI; YAHATA, NAOKI; NISHIMORI, TOSHIHIKO; OOBA, YOSHIYUKI
To: MITSUBISHI HEAVY INDUSTRIES, LTD.
Reel/Frame 014243/0915 →
Assignment of Assignor's Interest
Nov 21, 2008
From: PHYZCHEMIX CORPORATION
To: CANON AVELVA CORPORATION
Reel/Frame 021915/0398 →
Corrective Assignment to Correct the Assignee Name from Canon Avelva Corporation to Canon Anelva Corporation Previously Recorded on Reel 021915 Frame 0398. Assignor(S) Hereby Confirms the Assignment.
Dec 31, 2008
From: PHYZCHEMIX CORPORATION
To: CANON ANELVA CORPORATION
Reel/Frame 022059/0972 →
Document Previously Recorded at Reel 021915 Frame 0398 Contained Errors in Patent Application Number 12/260,153. Document Rerecorded to Correct Errors on Stated Reel.
Jan 9, 2009
From: PHYZCHEMIX CORPORATION
To: CANON ANELVA CORPORATION
Reel/Frame 022094/0218 →