Memory element with improved contacts
View Patent ↗A phase-change memory element comprising a phase-change memory material, a first electrical contact and a second electrical contact. At least one of the electrical contacts having a sidewall electrically coupled to the memory material.
1. A method of making a memory element, comprising: providing a first dielectric layer, forming a first conductive layer over said first dielectric layer; forming a second dielectric layer over said first conductive layer, and introducing a phase-change memory material electrically coupled to a sidewall of said first conductive layer;
wherein said introducing said phase-change material comprises the steps of: forming an opening in said second dielectric layer and said first conductive layer so as to expose the sidewall surface of said first conductive layer and to expose said first dielectric layer; and depositing a phase-change material within said opening.
2. The method of claim 1 , further comprising the step of forming a second conductive layer over said second dielectric layer before introducing said phase-change material, said phase-change material being electrically coupled to a sidewall of said second conductive layer.
3. The method of claim 1 , wherein said phase-change material comprises a chalcogen element.