Semiconductor device and method of manufacturing semiconductor device

1. A method for manufacturing a semiconductor device, comprising:

forming above a substrate an insulating film comprising a metal, Si, N and O, by off-axis sputtering, the insulating film comprising more metal-N bonds than the total sum of metal-metal bonds and metal-Si bonds; and

forming an electrode above the insulating film.

2. The method for manufacturing a semiconductor device according to claim 1 , further comprising:

doping an impurity into the substrate, after forming the electrode, by using the electrode as a mask to form an impurity diffusion region.

3. A method for manufacturing a semiconductor device, comprising:

forming above a substrate a nitride film having an off-stoichiometric composition comprising metal and Si by off-axis sputtering;

oxidizing the nitride film to form an insulating film comprising more metal-N bonds than the total sum of metal-metal bonds and metal-Si bonds; and

forming an electrode above the insulating film.

4. The method for manufacturing a semiconductor device according to claim 3 , further comprising:

doping an impurity into the substrate, after forming the electrode, by using the electrode as a mask to form an impurity diffusion region.

5. A method for manufacturing a semiconductor device, comprising:

forming above a substrate an oxide film having an off-stoichiometric composition comprising metal and Si by off-axis sputtering;

nitriding the oxide film to form an insulating film comprising more metal-N bonds than the total sum of metal-metal bonds and metal-Si bonds; and

forming an electrode above the insulating film.

6. The method for manufacturing a semiconductor device according to claim 5 , further comprising:

doping an impurity into the substrate, after forming the electrode, by using the electrode as a mask to form an impurity diffusion region.

7. A method for manufacturing a semiconductor device, comprising:

forming above a substrate a metal silicide film having an off-stoichiometric composition comprising metal and Si by off-axis sputtering;

oxynitriding the metal silicide film to form an insulating film comprising more metal-N bonds than the total sum of metal-metal bonds and metal-Si bonds; and

forming an electrode on the insulating film.

8. The method for manufacturing a semiconductor device according to claim 7 , further comprising:

doping an impurity into the substrate, after forming the electrode, by using the electrode as a mask to form an impurity diffusion region.

9. The method for manufacturing a semiconductor device according to claim 1 , wherein the metal is Hf, the content of N in the insulating film is 28.5 atomic % to 52 atomic %, the content of the metal-N bonds in the insulating film is 1 atomic % or more, and metallic bonds formed by the metal-metal bonds and metal-Si bonds are not substantially present.

10. The method for manufacturing a semiconductor device according to claim 3 , wherein the metal is Hf, the content of N in the insulating film is 28.5 atomic % to 52 atomic %, the content of the metal-N bonds in the insulating film is 1 atomic % or more, and metallic bonds formed the metal-metal bonds and metal-Si bonds are not substantially present.

11. The method for manufacturing a semiconductor device according to claim 5 , wherein the metal is Hf, the content of N in the insulating film is 28.5 atomic % to 52 atomic %, the content of the metal-N bonds in the insulating film is 1 atomic % or more, and metallic bonds formed by the metal-metal bonds and metal-Si bonds are not substantially present.

12. The method for manufacturing a semiconductor device according to claim 7 , wherein the metal is Hf, the content of N in the insulating film is 28.5 atomic % to 52 atomic %, the content of the metal-N bonds in the insulating film is 1 atomic % or more, and metallic bonds formed by the metal-metal bonds and metal-Si bonds are not substantially present.