Oxygen bridge structures and methods to form oxygen bridge structures
View Patent ↗A method is proposed for improving the adhesion between a diffusion barrier film and a metal film. Both the diffusion barrier film and the metal film can be deposited in either sequence onto a semiconductor substrate. A substrate comprising a first film, which is one of a diffusion barrier film or a metal film, with the first film being exposed at least at part of the surface area of the substrate, is exposed to an oxygen-containing reactant to create a surface termination of about one monolayer of oxygen-containing groups or oxygen atoms on the exposed parts of the first film. Then the second film, which is the other one of a diffusion barrier film and a metal film, is deposited onto the substrate. Furthermore, an oxygen bridge structure is proposed, the structure comprising a diffusion barrier film and a metal film having an interface with the diffusion barrier film, wherein the interface comprises a monolayer of oxygen atoms.
1. A method for manufacturing a semiconductor device, the method comprising:
depositing a diffusion barrier film on a substrate;
depositing a metal film onto the substrate; and
forming an oxygen bridge between the diffusion barrier and the metal film, wherein forming an oxygen bridge comprises exposing the substrate to an oxygen-containing reactant to create a surface termination on the metal film of about one monolayer of oxygen-containing groups or oxygen atoms.
2. A method for manufacturing a semiconductor device, the method comprising:
depositing a diffusion barrier film on a substrate;
depositing a metal film onto the substrate; and
forming an oxygen bridge between the diffusion barrier and the metal film, wherein forming an oxygen bridge comprises exposing the substrate to a hydroxyl-containing reactant under atomic layer deposition (ALD) conditions to create a surface termination of about one monolayer of hydroxyl groups on the substrate surface.
3. The method of claim 2 , wherein the step of exposing the substrate to a hydroxyl-containing reactant under ALD conditions comprises subjecting the substrate to a repeated and alternating sequence of a metal-containing reactant exposure step and a hydroxyl-containing reactant exposure step.
4. The method of claim 3 , wherein the sequence is repeated from one to fifty times.
5. A method for manufacturing a semiconductor device, the method comprising:
depositing a diffusion barrier film on a substrate;
depositing a metal film onto the substrate; and
forming an oxygen bridge between the diffusion barrier and the metal film, wherein forming an oxygen bridge comprises exposing the substrate to a hydroxyl-containing reactant to create a surface termination of about one monolayer of oxygen-containing groups or oxygen atoms on the substrate surface, and wherein the hydroxyl-containing reactant comprises at least one of methanol, ethanol, propanol, formic acid, and acetic acid.