Method for selective chemical vapor deposition of nanotubes
A method of fabricating a nanotube structure which includes providing a substrate, providing a mask region positioned on the substrate, patterning and etching through the mask region to form at least one trench, depositing a conductive material layer within the at least one trench, depositing a solvent based nanoparticle catalyst onto the conductive material layer within the at least one trench, removing the mask region and subsequent layers grown thereon using a lift-off process, and forming at least one nanotube electrically connected to the conductive material layer using chemical vapor deposition with a methane precursor.
1. A method of fabricating nanotube structures comprising the steps of:
providing a substrate;
providing at least one electronic circuit positioned on the substrate;
providing a mask region positioned on the substrate and the at least one electronic circuit;
patterning and etching through the mask region;
depositing a nanoparticle catalyst which includes a solvent onto the at least one electronic circuit;
removing the mask region;
forming at least one nanotube with a first end and a second end using a reaction chamber; and
wherein the first end of the at least one nanotube is connected to a first portion of the at least one circuit and the second end of the at least one nanotube is connected to a second portion of the at least one circuit.
2. A method as claimed in claim 1 wherein the step of depositing the nanoparticle catalyst includes one of spraying on and spinning on the nanoparticle catalyst.
3. A method as claimed in claim 1 wherein the step of forming the at least one nanotube includes a step of using one of methane, ethylene, acetylene, carbon monoxide, and another suitable hydrocarbon gas within the reaction chamber.
4. A method as claimed in claim 1 wherein the reaction chamber includes one of a chemical vapor deposition chamber, a molecular beam epitaxy chamber, a chemical beam epitaxy chamber, and another suitable chamber.
5. A method as claimed in claim 1 wherein the at least one nanotube includes one of carbon, boron nitride, and another suitable nanotube forming material.
6. A method as claimed in claim 1 further including the step of forming the at least one nanotube in the presence of an electric field.
7. A method as claimed in claim 1 wherein the first and second ends are electrically coupled to the first and second portions, respectively.