Trench-capacitor DRAM device and manufacture method thereof
View Patent ↗A method for fabricating a trench capacitor is disclosed. A substrate having a first pad layer is provided. STI structure is embedded into the first pad layer and the substrate. A second pad layer is deposited over the first pad layer and the STI structure. Two adjacent trenches are etched into the first, second pad layers, and the semiconductor substrate. The second pad layer and a portion of the STI structure between the two trenches are etched to form a ridge. A liner is formed on interior surface of the trenches. A first polysilicon layer is formed on the liner. A capacitor dielectric layer is formed on the first polysilicon layer. The two adjacent trenches are filled with a second polysilicon layer. The second polysilicon layer is then etched until the capacitor dielectric layer is exposed. The fabrication process is easy to integrate to SoC chip.
1. A method for fabricating a dual-trench capacitor of a dynamic random access memory (DRAM) device, comprising:
providing a semiconductor substrate having a first pad layer;
embedding a shallow trench isolation (STI) structure into the first pad layer and the semiconductor substrate;
forming a second pad layer over the first pad layer and the STI structure;
etching two adjacent trenches into the first, second pad layers, the STI structure and the semiconductor substrate, wherein the STI structure is between the two adjacent trenches;
etching away the second pad layer and a portion of the STI structure between the two adjacent trenches to form a ridge between the two adjacent trenches, wherein the ridge's top is lower than a main surface of the semiconductor substrate;
forming an insulation liner on interior surface of the two adjacent trenches including surface of the ridge;
forming a first polysilicon layer on the insulation liner within the two adjacent trenches, the first polysilicon layer overlying the ridge;
forming a capacitor dielectric layer on the first polysilicon layer;
filling the two adjacent trenches with a second polysilicon layer on the capacitor dielectric layer; and
etching the second polysilicon layer until the capacitor dielectric layer that is directly above the ridge is exposed.
2. The method according to claim 1 wherein after etching the second polysilicon layer, the method further comprises the following steps:
blanket depositing an oxide layer to fill the two adjacent trenches;
chemical mechanical polishing the oxide layer using the second pad layer as a polish stop layer, thereby forming a trench top oxide (TTO) layer;
stripping the first and second pad layer to expose an active area of the semiconductor substrate;
performing an oxidation to form a gate dielectric layer on the active area of the semiconductor substrate; and
forming a gate on the gate dielectric layer.
3. The method according to claim 2 wherein after forming a gate on the gate oxide layer, the method further comprises the following step:
forming a share contact bridging the second polysilicon layer and a source/drain next to the gate.
4. The method according to claim 1 wherein the first pad layer includes a pad oxide layer and pad nitride layer.
5. The method according to claim 1 wherein the second pad layer comprises silicon nitride.
6. The method according to claim 1 wherein the insulation liner comprises silicon oxide.
7. The method according to claim 6 wherein the insulation liner has a thickness of 30-300 angstroms.
8. The method according to claim 1 wherein the capacitor dielectric layer comprises oxide-nitride-oxide (ONO) dielectric.