Abrasive Electrolyte
An abrasive electrolyte solution adapted for thinning a layer on a substrate without contaminating the substrate. The abrasive electrolyte solution includes an electrically conductive fluid that is substantially free of materials that are reactive within a desired operating voltage potential range, and substantially free of materials that inhibit desired reactions within the desired operating voltage potential range. Also included are abrasive particles that have a size that is small enough for the particles to substantially remain in suspension in the electrically conductive fluid, and large enough for the particles to provide a desired degree of erosion of the layer on the substrate when the abrasive electrolyte solution is forced against the layer on the substrate.
1 . (canceled)
2 . (canceled)
3 . (canceled)
4 . (canceled)
5 . (canceled)
6 . (canceled)
7 . (canceled)
8 . (canceled)
9 . (canceled)
10 . (canceled)
11 . (canceled)
12 . (canceled)
13 . (canceled)
14 . (canceled)
15 . (canceled)
16 . A method for thinning a layer on a substrate, the method comprising the step of forcing an abrasive electrolyte solution against the layer on the substrate with at least one of a brush and a spray while applying a voltage potential through the abrasive electrolyte solution between the substrate and a second electrode, where the layer is thinned both physically by the abrasive electrolyte solution and electrolytically by the voltage potential applied through the abrasive electrolyte solution.
17 . (canceled)
18 . (canceled)
19 . (canceled)
20 . (canceled)