Micro sample heating apparatus and method of making the same
View Patent ↗A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.
1. A micro sample heating apparatus, comprising:
a substrate;
a micro heating device disposed on a first surface of the substrate;
a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate; and
an isolation structure positioned on the second surface of the substrate, the isolation structure having an opening corresponding to the cavity;
wherein the cavity and the opening form a sample room.
2. The micro sample heating apparatus of claim 1 , wherein the substrate is an epitaxy substrate.
3. The micro sample heating apparatus of claim 1 , further comprising an insulating layer disposed between the first surface of the substrate and the micro heating device.
4. The micro sample heating apparatus of claim 1 , wherein the micro heating device comprises a metal layer disposed on the first surface of the substrate, and a metal wiring layer disposed on the metal layer.
5. The micro sample heating apparatus of claim 1 , wherein the cavity does not penetrate through the substrate.
6. The micro sample heating apparatus of claim 1 , wherein the isolation structure comprises glass.
7. A method of fabricating micro sample heating apparatuses, comprising:
providing a substrate, and forming a plurality of micro heating devices on a first surface of the substrate;
forming a plurality of cavities corresponding to the micro heating devices in a second surface of the substrate, each cavity having an inclined sidewall;
providing an isolation structure having a plurality of openings; and
bonding the isolation structure to the second surface of the substrate, each opening being corresponding to each cavity;
wherein each cavity and each opening corresponding to the cavity form a sample room.
8. The method of claim 7 , further comprising forming an insulating layer on the first surface of the substrate prior to forming the micro heating devices.
9. The method of claim 7 , wherein forming the micro heating devices comprises:
forming a metal layer on the first surface of the substrate; and
forming a metal wiring layer on the metal layer.
10. The method of claim 9 , wherein the metal layer and the metal wiring layer are formed by lift-off techniques.
11. The method of claim 7 , wherein the substrate is an epitaxy substrate.
12. The method of claim 7 , wherein the cavity is formed by an electro-chemical etching process.
13. The method of claim 12 , wherein the electro-chemical etching process does not etch through the substrate.
14. The method of claim 7 , wherein the isolation structure comprises glass.
15. The method of claim 7 , wherein the isolation structure is bonded to the substrate by anodic bonding techniques.
16. The method of claim 7 , further comprising performing a segment process to form a plurality of micro sample heating apparatuses subsequent to bonding the isolation structure to the substrate.