Micropump for electronics cooling

1. A micropump including one or more microchannels for receiving a fluid and a plurality of electrodes arranged and energized in a manner to impart electrohydrodynamic-induced flow to the fluid in the one or more microchannels, a vibratable diaphragm facing said one or more microchannels, and an actuator for imparting vibration motion to the diaphragm relative to fluid in the one or more microchannels, whereby the diaphragm vibration motion together with the electrohydrodynamic-induced flow produce a higher volume flow rate of fluid than the electrohydrodynamic-induced flow alone.

2. The micropump of claim 1 wherein the electrodes are disposed transverse to a direction of flow of the fluid in said one or more microchannels.

3. The micropump of claim 1 wherein the electrodes are disposed on a surface of the diaphragm facing said one or more microchannels.

4. The micropump of claim 1 wherein said one or more microchannels each have a constant width dimension perpendicular to a direction of flow of the fluid therethrough.

5. The micropump of claim 1 wherein said one or more microchannels each have a cross-sectional shape selected from trapezoidal, rectangular or triangular.

6. A method of delivering a fluid comprising a drug or medicine, including pumping the fluid using a micropump of claim 1 for delivery to a patient.

7. A micropump including one or more microchannels for receiving a fluid, a vibratable diaphragm closing off said one or more microchannels, and a plurality of electrodes disposed on a surface of the diaphragm facing said one or more microchannels and energized in a manner to impart electrohydrodynamic-induced flow to the fluid in the one or more microchannels, and an actuator for imparting vibration motion to the diaphragm, whereby the diaphragm vibration motion together with the electrohydrodynamic-induced flow produce a higher volume flow rate of fluid than the electrohydrodynamic-induced flow alone.

8. The micropump of claim 7 wherein the electrodes are disposed transverse to a direction of flow of the fluid in said one or more microchannels.

9. The micropump of claim 7 wherein said one or more microchannels each have a uniform width dimension perpendicular to a direction of flow of the fluid therethrough.

10. The micropump of claim 9 wherein said one or more microchannels each have a crosss-sectional shape selected from trapezoidal, rectangular or triangular.

11. Combination of a heat-generating electronic component and a micropump of claim 7 in thermal transfer relation with the component to remove heat therefrom, wherein the plurality of electrodes are arranged and energized in a manner to impart electrohydrodynamic-induced flow to the fluid in the one or more microchannels together with the diaphragm vibration motion relative to the fluid in the one or more microchannels such that a higher volume flow rate of fluid is achieved than with electrohydrodynamic-induced flow alone.

12. A method of cooling a heat-generating electronic component, comprising removing heat from the component using a micropump of claim 7 by disposing the one or more microchannels in thermal transfer relation to the component and energizing the plurality of electrodes in a manner to impart the electrohydrodynamic-induced flow to the fluid while vibrating the diaphragm relative to the fluid in the one or more microchannels such that a higher volume flow rate of fluid is achieved than with electrohydrodynamic-induced flow alone.

13. A method of flowing a fluid, comprising imparting motion to the fluid by energizing electrodes proximate the fluid in one or more microchannels to impart electrohydrodynamic-induced flow to the fluid while vibrating a diaphragm relative to the fluid in the one or more microchannels such that a higher volume flow rate of fluid is achieved than with electrohydrodynamic-induced flow alone.

14. The method of claim 13 wherein vibration is imparted to the fluid.